Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

Becher, Malte; Jagosz, Julia; Bock, Claudia; Ostendorf, Andreas; Gurevich, Evgeny L.

doi:10.3389/fnano.2023.1227025

Front. Nanotechnol.

2023

DOI: 10.3389/fnano.2023.1227025

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Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

Malte Becher

Julia Jagosz

Claudia Bock

et al.

Abstract: The formation of laser-induced periodic surface structures (LIPSSs) on the atomic layer-deposited (ALD) molybdenum disulfide (MoS2) upon femtosecond laser processing is studied experimentally. Laser-processing parameters such as average laser power and the scan speed at which the formation of the periodic nanostructures takes place are identified. Optical and scanning electron microscopy are applied to identify the parameter regions for the different LIPSS formations and transitions between them. High- and low… Show more

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Cited by 5 publications

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Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS₂ Films

Becher,

Jagosz,

Neubieser

et al. 2023

Adv Eng Mater

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To implement 2D molybendum disulfide (MoS2) in the flexible electronic industry large, uniform, crystalline films on flexible substrates are needed. Thermal atomic layer deposition (ALD) generates large‐area uniform MoS2 films at low temperatures directly on temperature sensitive substrates. But if the grown films are amorphous a high temperature post treatment of the whole sample, which may cause thermal degradation of the substrate or other layers, needs to be avoided. In this paper we report the crystallization of amorphous MoS2 layers deposited by thermal ALD processed with picosecond laser laser pulses (λ = 532 nm), in a “cold” annealing process. The laser fluence range varies from Fmin = 8.73 mJ cm−2 to Fmax = 18.25 mJ cm−2 with scanning speeds from vscan,min = 240 mm s−1 to vscan,max = 2640 mm s−1. The crystallization and the influence of the processing parameters on the film morphology are analyzed in detail by Raman spectroscopy and scanning electron microscopy. Furthermore, a transition of amorphous MoS2 by laser annealing to self‐organized patterns is demonstrated and a possible process mechanism for the ultrashort pulse laser annealing is discussed. Finally, the usp laser annealed films are compared to thermally and continuous wave (cw) laser annealed samples.This article is protected by copyright. All rights reserved.

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Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS₂ Films

Becher,

Jagosz,

Neubieser

et al. 2023

Adv Eng Mater

Self Cite

View full text Add to dashboard Cite

show abstract

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS₂

Becher,

Ullrich,

Jagosz

et al. 2024

Adv Materials Inter

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In this paper, the formation of laser‐induced periodic surface structures (LIPSS) on atomic‐layer deposited MoS2 layers are studied experimentally. The process parameters (laser fluence and the pulse overlap) corresponding to formation of low‐ and high‐spatial frequency LIPSS as well as ablation and modification of the layers are identified for different pulse durations in the range from 0.2 to 10 ps. The role of the temperature accumulation is evaluated by changing the repetition rate from 0.2 to 2 MHz. The negative accumulation effect, i.e., the ablation of the layers becomes more difficult at higher laser pulse overlaps, is also observed. A simple model explaining the transition between different types of the LIPSS and the decrease of the ablation efficiency with the pulse overlap is suggested.

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Beyond the Microscale: Advances in Surface Nanopatterning by Laser‐Driven Self‐Organization

Nakhoul,

Colombier

2024

Laser & Photonics Reviews

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Designing complex local properties that seamlessly integrate efficient functions into processed materials presents a formidable challenge. A promising solution has emerged in the form of ultrafast laser‐surface structuring. Through time‐controlled polarization ultrafast irradiation at the picosecond timescale, spontaneous self‐organization of surfaces can be induced. The thermal gradient length scale unfolds on the micro‐ and nanoscale, instigating thermoconvection that leads to structured surfaces upon quenching. Convective instabilities dynamically shape intricate yet self‐regulated periodic relief structures. The ability to achieve laser‐induced self‐organization in both surface dimensions holds immense scientific importance, as it unlocks the potential to create uniform periodic 2D patterns by harnessing the inherent regulation of nonlinear dynamics processes in fluids. This comprehensive review explores recent advances in understanding and leveraging ultrafast laser‐induced self‐organization for precise patterning across versatile scales and applications. The insights herein hold the potential to drive significant advancements in nanoscale manufacturing through 2D laser‐induced periodic surface structures.

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Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

Cited by 5 publications

References 32 publications

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS₂ Films

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS₂ Films

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS₂

Beyond the Microscale: Advances in Surface Nanopatterning by Laser‐Driven Self‐Organization

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Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

Cited by 5 publications

References 32 publications

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS2 Films

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS2 Films

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS2

Beyond the Microscale: Advances in Surface Nanopatterning by Laser‐Driven Self‐Organization

Contact Info

Product

Resources

About

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS₂ Films

Ultrashort‐Pulsed‐Laser Annealing of Amorphous Atomic‐Layer‐Deposited MoS₂ Films

Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS₂