Formation of nanostructured TiAlN, TiCrN, and TiSiN coatings using reactive magnetron sputtering

Komarov, F. F.; Konstantinov, S. V.; Пилько, В. В.

doi:10.3103/s1068366614030064

Cited by 25 publications

(9 citation statements)

References 5 publications

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“…Recent research found TiAlN with hardness values of up to 35GPa, which is 50% higher than that of TiN [6,7]. Further research investigated the influence of new dopants other than Al into the TiN lattice, such as: Si, Nb, Mo, B, Si and Cr amongst others [8][9][10][11][12].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

High temperature in-situ phase stability of sputtered TiAlxN coatings

Patel

Mohammadpour

Mondinos

et al. 2019

Journal of Alloys and Compounds

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The temperature dependence of phase composition and lattice parameters, for TiAl x N thin film coating, are experimentally investigated by in-situ synchrotron radiation X-ray diffraction (SR-XRD), at temperatures between 25°C to 700 °C. Mechanical properties, such as: Young's modulus (E), hardness (H) and plastic deformation index (PDI)-were experimentally determined by nanoindentation, at 25 °C. Crystalline structural analysis, of SR-XRD results, indicates the major phases are TiN and AlN; with Ti 2 O and TiO 2 phases also present above 600 °C. The lattice constants increased with an increase in temperature. Atomic and phase compositions, at 25 °C, were also verified by X-ray photoelectron spectroscopy (XPS). Field emission scanning electron microscopy (FESEM) images display an increase in surface roughness and reduction in grain size, with increasing Aluminium percentage (Al%). Nanoindentation analysis showed a maximum hardness of 25.1 ± 1.5 GPa (sample containing 12% Al), which was subsequently reduced upon addition of more Aluminium. Finite element modelling (FEM), including von Mises stress distribution, indicates lower mechanical integrity, for samples with high Al% content.

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Section: Accepted Manuscriptmentioning

confidence: 99%

High temperature in-situ phase stability of sputtered TiAlxN coatings

Patel

Mohammadpour

Mondinos

et al. 2019

Journal of Alloys and Compounds

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“…In the literature, the authors have shown that certain properties are determined by the orientation of the crystallites on the substrate. That is, the FWHM width of the ZnO peak along the orientation (002) of the X-ray inclination curve should be less than 0.58 to achieve an effective electromechanical coupling [18,19]. Other studies have shown the frequency dependence of the electrical properties of ZnO sandwich structures [20].…”

Section: Introductionmentioning

confidence: 99%

Capacitive properties of zinc oxide thin films by radiofrequency magnetron sputtering

Ondo-Ndong¹,

Essone-Obame²,

Moussambi³

et al. 2018

J Theor Appl Phys

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The study focused on the production of zinc oxide (ZnO) thin films as a dielectric material for use in metal-insulator-semiconductor capacitors. The objective of this study has demonstrated the frequency dependence of conductivity and capacity. Zinc oxide (ZnO) was thin films deposited by a silicon wavelength sputtering\magnetron cathode sputtering. The capacitive properties of ZnO zinc oxide were studied at room temperature. The frequency dependence of the conductivity, capacitance and the measured current-voltage (I-V) characteristics of ZnO zinc oxide thin films were studied in the frequency range from 5 kHz to 13 MHz. It is shown that the conductivity is total. Indeed, the measurement of the conductivity in alternating regime obeys the Arrhenius equation. In addition, the measured I-V characteristics of the structures studied at 10 kHz and 10 MHz clearly revealed areas of accumulation, depletion and inversion in the plots. It has been observed that AC conductivity and capacity in the ZnO thin films (ZnO) are frequency dependent. This dependence indicates that the conduction is thermally activated and maintains the correlated barrier of the charge carrier on the localized states as a function of the experimental data. The FBAR (expand) devices with the ZnO films exhibited a pronounced resonance peak centered at 537 MHz with a k 2 coupling coefficient of 7%. It found therefore that the impedance matching of the FBAR could be easily achieved simply by controlling the resonance the resonator.

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“…It has been considered as a very effective deposition method of thin film. [5][6][7][8][9][10][11][12][13] In this work, metallic silver (Ag) and titanium dioxide (TiO 2 ) films were deposited on a textile substrate by magnetron sputtering technology. Silver has excellent electrical, optical, and chemical properties, whereas titanium dioxide has high photocatalytic activity, good chemical stability, and environmental friendliness.…”

mentioning

confidence: 99%

Electrical and optical properties of polyester fabric coated with Ag/TiO₂ composite films by magnetron sputtering

Yuan

Wei

Chen

et al. 2015

Textile Research Journal

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Silver/titanium dioxide (Ag/TiO 2 ) composite films were successfully deposited on polyester fabric by using direct current (DC) magnetron sputtering and radiofrequency (RF) magnetron reaction sputtering techniques with pure Ag and Ti targets. Atomic force microscope and X-ray photoelectron spectroscopy were used to examine the structure and composition of Ag/TiO 2 composite films. Anti-ultraviolet properties and antistatic properties of the Ag/TiO 2 coated fabric were investigated, and structural color of the Ag/TiO 2 coated fabric was also analyzed. The experimental results showed that the composite films deposited on textile substrates were even and dense. It was also found that Ag in Ag/ TiO 2 composite films was elemental silver, but Ti in Ag/TiO 2 composite films was completely oxidized, and existed in TiO 2 form . Compared with the original fabric samples, anti-ultraviolet properties and antistatic properties of the fabrics deposited with Ag/TiO 2 composite films were improved significantly; meanwhile, different structural colors of the coated fabrics were generated.

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Formation of nanostructured TiAlN, TiCrN, and TiSiN coatings using reactive magnetron sputtering

Cited by 25 publications

References 5 publications

High temperature in-situ phase stability of sputtered TiAlxN coatings

High temperature in-situ phase stability of sputtered TiAlxN coatings

Capacitive properties of zinc oxide thin films by radiofrequency magnetron sputtering

Electrical and optical properties of polyester fabric coated with Ag/TiO₂ composite films by magnetron sputtering

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Formation of nanostructured TiAlN, TiCrN, and TiSiN coatings using reactive magnetron sputtering

Cited by 25 publications

References 5 publications

High temperature in-situ phase stability of sputtered TiAlxN coatings

High temperature in-situ phase stability of sputtered TiAlxN coatings

Capacitive properties of zinc oxide thin films by radiofrequency magnetron sputtering

Electrical and optical properties of polyester fabric coated with Ag/TiO2 composite films by magnetron sputtering

Contact Info

Product

Resources

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Electrical and optical properties of polyester fabric coated with Ag/TiO₂ composite films by magnetron sputtering