“…In fact, Ti and N 2 could form to several different stoichiometric ratio compounds, such as Ti 2 N, Ti 5 N 2 and TiN. However, in most previous thermodynamic studies, XRD showed that the final phase compositions are Ti and TiN [2,10]. The Gibbs free energy that varies with temperature was also calculated by Factsage 6.2.…”