Formation of various-axis-oriented wurtzite nuclei and enlargement of the <i>a</i>-axis-oriented region in AlFeN films deposited on Si(100) substrates

Imada, Saki; Isshiki, Takaaki; Tatemizo, Nobuyuki; Nishio, Koji; Mamishin, Shuichi; Suzuki, Yuya; Ito, Kohei; Nitta, Kiyofumi; Suga, Hiroki; Sekizawa, Oki; Tamenori, Y.

doi:10.1039/d0ma01026j

Mater. Adv.

2021

DOI: 10.1039/d0ma01026j

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Formation of various-axis-oriented wurtzite nuclei and enlargement of the a-axis-oriented region in AlFeN films deposited on Si(100) substrates

Saki Imada

Takaaki Isshiki

Nobuyuki Tatemizo

et al.

Abstract: Wurtzite AlN films with high Fe concentrations were deposited on Si(100) substrates using radio-frequency sputtering, and the growth process was investigated. X-ray diffraction (XRD) analyses with parallel incident X-rays showed...

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Formation of various-axis-oriented wurtzite nuclei and enlargement of the a-axis-oriented region in AlFeN films deposited on Si(100) substrates

Abstract: Wurtzite AlN films with high Fe concentrations were deposited on Si(100) substrates using radio-frequency sputtering, and the growth process was investigated. X-ray diffraction (XRD) analyses with parallel incident X-rays showed...

Cited by 0 publications

References 31 publications

No citations

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