2017
DOI: 10.1007/s41365-017-0291-y
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Formulae for secondary electron yield from insulators and semiconductors

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Cited by 9 publications
(1 citation statement)
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“…The emission yield of ESEs from the surface of an irradiated window, , is a function of the TEM beam energy, E 0 (δ ∝ E 0 –0.8 ), the probability of ISE generation per incident electron, and the probability of ISE escape from the window surface. The latter two are related to electronic properties of the window, with theoretical and experimental values available for many elements/materials (Stopping Power, ISE escape depth, work function, and electron affinity). Based on Bethe theory and ESE yield measurements at sub-50 keV incident electron beam energies, ,, the theoretical yield of ESEs emitted into the vacuum from in an a -Si 3 N x , or other semiconductor membranes under ca. 50–300 keV irradiation, is on the order of δ ∼ 0.05–0.25 ESEs per single incident electron, a value which is independent of membrane thickness for membranes thicker than ca.…”
Section: Irradiating the Vessel With The Imaging E-beammentioning
confidence: 99%
“…The emission yield of ESEs from the surface of an irradiated window, , is a function of the TEM beam energy, E 0 (δ ∝ E 0 –0.8 ), the probability of ISE generation per incident electron, and the probability of ISE escape from the window surface. The latter two are related to electronic properties of the window, with theoretical and experimental values available for many elements/materials (Stopping Power, ISE escape depth, work function, and electron affinity). Based on Bethe theory and ESE yield measurements at sub-50 keV incident electron beam energies, ,, the theoretical yield of ESEs emitted into the vacuum from in an a -Si 3 N x , or other semiconductor membranes under ca. 50–300 keV irradiation, is on the order of δ ∼ 0.05–0.25 ESEs per single incident electron, a value which is independent of membrane thickness for membranes thicker than ca.…”
Section: Irradiating the Vessel With The Imaging E-beammentioning
confidence: 99%