Formulae of Total Electron Yield for Multilayers: Extension of Pepper's Method

Ejima, Takeo

doi:10.1143/jjap.42.6459

Cited by 14 publications

(25 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…TEY simulations were made under the following conditions using the extended Pepper's method for a multilayer 4 . Optical constants used in the simulations were the same as those in the reflectance simulations.…”

Section: -2 Angle Of Incidencementioning

confidence: 99%

“…Simulated TEY spectra were compared with the observed ones in shape, but their absolute values were not compared. Therefore, the transmission rate for the surface was fixed at 1, and, for simplicity, the emitted photoelectrons below the top layer were neglected in the present TEY simulations [3,4]. The thickness of the top B 4 C layer was adjusted for the calculated peak position and shape to coincide with that observed.…”

Section: -2 Angle Of Incidencementioning

confidence: 99%

“…(8) in ref. 4. In the calculation, roughness values at the surface and interfaces are neglected for simplicity.…”

Section: -3 Depth-dependence Of the Absorbed Energymentioning

confidence: 99%

“…The energy position of this Bragg TEY peak differs from that of the Bragg reflection peak, and the peak shape shows asymmetry. These properties of the Bragg TEY peak were analyzed by extending Pepper's formulae for a single layer 2 to those in the multilayer 3,4 . The analysis result suggests that the peak position and the shape reflect strongly the top-layer thickness, because the detected photoelectrons are mainly emitted from the top layer in which the number of emitted photoelectrons depend strongly on the node-and anti-node-positions of the standing waves.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Ejima

Muramatsu²,

Takenaka

2004

SPIE Proceedings

Self Cite

View full text Add to dashboard Cite

By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B 4 C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B 4 C 36.57Å] and [Ru 24.06Å/B 4 C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

show abstract

Section: -2 Angle Of Incidencementioning

confidence: 99%

Section: -2 Angle Of Incidencementioning

confidence: 99%

“…(8) in ref. 4. In the calculation, roughness values at the surface and interfaces are neglected for simplicity.…”

Section: -3 Depth-dependence Of the Absorbed Energymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Ejima

Muramatsu²,

Takenaka

2004

SPIE Proceedings

Self Cite

View full text Add to dashboard Cite

show abstract

“…S. V. Pepper reported that optical constants of thin films can be obtained by measuring the angle dependence of the TEY intensity, and analyzing the TEY intensity curve on the basis of his formulae [5]. These formulae allow one to analyze the TEY intensities of reflection multilayers [6].…”

Section: Introductionmentioning

confidence: 99%

Optical constant measurements of the uppermost layer of a reflection multilayer using reflection and total electron yield spectra

2006

Self Cite

View full text Add to dashboard Cite

Total electron yield (TEY) is a method for obtaining optical constants by measuring the angle dependence of the yield intensity in the soft X-ray region [S. V. Pepper, J. Opt. Soc. Am. 60, 805 (1970)]. In this study, previous methods are extended by rewriting the previous formulae of yield intensity: the intensity was directly related to a reflectance and phase value corresponding to both the thickness of the uppermost layer and the reflection phase. Phase values obtained practically from the reflection and TEY measurements were found to change in accordance with increases in the thickness of the uppermost Mo layer. Refractive indices were derived from the phase differences between the two different phase values corresponding to the variation in the uppermost Mo layer. Practical study showed that the refractive indices of the uppermost Mo layer are close to those of MoO 2 .

show abstract