Fracture strength of glass chips for high-pressure microfluidics

Andersson, Martin; Hjort, Klas; Klintberg, Lena

doi:10.1088/0960-1317/26/9/095009

Cited by 15 publications

(15 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The simpler semi-circular channel geometry of the flow sensor allows for strength-comparisons using modeling to find the correlating fracture stress. The average fracture stress was 73 MPa which is about 40% less than the stresses seen for chips without electrodes, found in both our previous work [30] and the works of others [39][40]. This and the fact that the crack formation is irregular, following and exposing the metallization, suggest that metallization lowers the fracture strength and the integrated electrodes act as defects.…”

Section: Embedded Metal Layersmentioning

confidence: 47%

Thin film metal sensors in fusion bonded glass chips for high-pressure microfluidics

Andersson¹,

Ek²,

Hedman³

et al. 2016

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

High-pressure microfluidics offers fast analyses of thermodynamic parameters for compressed process solvents. However, microfluidic platforms handling highly compressible supercritical CO 2 are difficult to control, and on-chip sensing would offer added control of the devices. Therefore, there is a need to integrate sensors into highly pressure tolerant glass chips. In this paper, thin film Pt sensors were embedded in shallow etched trenches in a glass wafer that was bonded with another glass wafer having microfluidic channels. The devices having sensors integrated into the flow channels sustained pressures up to 220 bar, typical for the operation of supercritical CO 2. No leakage from the devices could be found. Integrated temperature sensors were capable of measuring local decompression cooling effects and integrated calorimetric sensors measured flow velocities over the range 0.5-13.8 mm/s. By this, a better control of highpressure microfluidic platforms has been achieved.

show abstract

Section: Embedded Metal Layersmentioning

confidence: 47%

Thin film metal sensors in fusion bonded glass chips for high-pressure microfluidics

Andersson¹,

Ek²,

Hedman³

et al. 2016

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

show abstract

“…The pressure tolerance in glass chips is affected by stress corrosion, a temperature dependent effect that can cause 45% lower longterm pressure tolerance at 80 °C compared to ambient temperature. 38 Furthermore, embedded electrodes can also affect the strength. 30 Yet, the pressure tolerance also depends on channel dimensions, 19 and as the heating was localized to the narrow restrictor channels, this effect might be mitigated.…”

Section: ■ Discussionmentioning

confidence: 99%

“…For larger span, higher temperatures are needed in the actuator chip. The pressure tolerance in glass chips is affected by stress corrosion, a temperature dependent effect that can cause 45% lower long-term pressure tolerance at 80 °C compared to ambient temperature . Furthermore, embedded electrodes can also affect the strength .…”

Section: Discussionmentioning

confidence: 99%

Microfluidic Control Board for High-Pressure Flow, Composition, and Relative Permittivity

et al. 2018

Self Cite

View full text Add to dashboard Cite

Flow control is central to microfluidics and chromatography. With decreasing dimensions and high pressures, precise fluid flows are often needed. In this paper, a high-pressure flow control system is presented, allowing for the miniaturization of chromatographic systems and the increased performance of microfluidic setups by controlling flow, composition, and relative permittivity of two-component flows with CO 2 . The system consists of four chips: two flow actuator chips, one mixing chip, and one relative permittivity sensor. The actuator chips, throttling the flow, required no moving parts as they instead relied on internal heaters to change the fluid resistance. This allows for flow control using miniaturized fluid delivery systems containing only a single pump or pressure source. Mobile phase gradients between 49% and 74% methanol in CO 2 were demonstrated. Depending on how the actuator chips were dimensioned, the position of this range could be set for different method-specific needs. With the microfluidic control board, both flow and composition could be controlled from constant pressure sources, drift could be removed, and variations in composition could be lowered by 84%, resulting in microflows of CO 2 and methanol with a variation in the composition of ±0.30%.

show abstract

“…Directly after bonding by a light pressure, the wafer stack was thermally treated at 625 °C under ambient pressure for 6 h. A detailed protocol is provided in previous work. 30 …”

Section: Methodsmentioning

confidence: 99%

“…Directly after bonding by a light pressure, the wafer stack was thermally treated at 625 ˚C under ambient pressure for 6 h. A detailed protocol is provided in previous work. 30 Next, thin-film electrodes were defined on the glass wafer stack. A flat top surface was achieved by recessing the electrodes into the glass.…”

Section: Experimental Fabrication Of the Heat-stagementioning

confidence: 99%

A microscopy-compatible temperature regulation system for single-cell phenotype analysis – demonstrated by thermoresponse mapping of microalgae

et al. 2021

Self Cite

View full text Add to dashboard Cite

show abstract

Fracture strength of glass chips for high-pressure microfluidics

Cited by 15 publications

References 30 publications

Thin film metal sensors in fusion bonded glass chips for high-pressure microfluidics

Thin film metal sensors in fusion bonded glass chips for high-pressure microfluidics

Microfluidic Control Board for High-Pressure Flow, Composition, and Relative Permittivity

A microscopy-compatible temperature regulation system for single-cell phenotype analysis – demonstrated by thermoresponse mapping of microalgae

Contact Info

Product

Resources

About