2000
DOI: 10.1016/s0924-4247(99)00366-0
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Fracture toughness of polysilicon MEMS devices

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Cited by 154 publications
(73 citation statements)
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“…The fracture strength typically ranges from 3 to 5 GPa depending on loading condition, specimen size, and test technique. The fracture toughness, K c , is ~1 MPa√m [13,22].…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The fracture strength typically ranges from 3 to 5 GPa depending on loading condition, specimen size, and test technique. The fracture toughness, K c , is ~1 MPa√m [13,22].…”
Section: Methodsmentioning
confidence: 99%
“…Silicon is generally regarded as a prototypical brittle material; dislocation activity is generally not observed at low homologous temperatures (below ~500°C) and there is little evidence of extrinsic toughening, such as by grain bridging or microcracking [13]. Moreover, silicon is not susceptible to environmentally-induced cracking (stress-corrosion cracking) in moist air or water [14][15][16] at growth rates measurable in bulk specimens.…”
Section: Introductionmentioning
confidence: 99%
“…It was quickly discovered by Connally and Brown [4] that the delayed failure under cyclic loading for micron-scale silicon differed from the macroscale behavior of the material. Silicon is a brittle material that does not exhibit any dislocation activity at low homologous temperatures [5] , any extrinsic toughening mechanisms [6] , or any evidence of susceptibility to environmentallyassisted cracking [7][8][9] . Based on this information and knowledge of macro-scale fatigue mechanisms [10] , silicon should not fatigue at room temperature and thus the findings of…”
Section: Introduction To Fatigue Of Micron-scale Siliconmentioning
confidence: 99%
“…Kahn et al [6] measure the fracture toughness of polysilicon MEMS devices using finite element analysis for experimental results. These experimental results were obtained using an especial sharpened mechanism to ensure accurate crack initiation and propagation perdition.…”
Section: Introductionmentioning
confidence: 99%