Frameworks for direct bonding

Haisma, J.; Spierings, G. A. C. M.; Michielsen, Theo M.

doi:10.1016/0165-5817(95)82001-9

Cited by 8 publications

(5 citation statements)

References 2 publications

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“…28,41 Such roughness parameter values, at least for the upper roughness limit, have also been obtained for gold films deposited by electron beam evaporation. 42 In this case, force measurements were only possible down to 12 nm separations due to jump to contact because of capillary forces, while the estimated distance upon contact via height histogram analysis from AFM images (Fig.…”

Section: Direct Bonding and Surface Roughnessmentioning

confidence: 99%

“…28,41 Indeed, direct bonding has also become known as van der Waals bonding: Bonding without glue is performed under ambient conditions. Such a bond can only be achieved under strict conditions 28,41 : the geometrical shape of the elements must be optimally congruous; the smoothness of the mechanically finished surface (rms roughness) must be within the subnanometer range; in most cases, the chemical treatment of the surface must be optimum; the physical state of the surface must be defect free; and the subsurface damage must usually be as small as possible. After annealing and other procedures, 28,41 the direct bond must become monolithic to guarantee a long life without decohesion of the bonded surfaces.…”

Section: Direct Bonding and Surface Roughnessmentioning

confidence: 99%

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Roughness correction to the Casimir force at short separations: Contact distance and extreme value statistics

et al. 2012

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So far there has been no reliable method to calculate the Casimir force at separations comparable to the root-mean square of the height fluctuations of the surfaces. Statistical analysis of rough gold samples has revealed the presence of peaks considerably higher than the root-mean-square roughness. These peaks redefine the minimum separation distance between the bodies and can be described by extreme value statistics. Here we show that the contribution of the high peaks to the Casimir force can be calculated with the proximity force approximation, while the contribution of asperities with normal height can be evaluated perturbatively. This method provides a reliable estimate of the Casimir force at short distances, and it solves the significant, so far unexplained discrepancy between measurements of the Casimir force between rough surfaces and the results of perturbation theory. Furthermore, we illustrate the importance of our results in a technologically relevant situation.

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Section: Direct Bonding and Surface Roughnessmentioning

confidence: 99%

Section: Direct Bonding and Surface Roughnessmentioning

confidence: 99%

Roughness correction to the Casimir force at short separations: Contact distance and extreme value statistics

et al. 2012

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“…To be more specific: in order to achieve direct bonding the rms roughness w must be < 2 nm and preferably even < 0.5 nm. 28,41 Such roughness parameter values, at least for the upper roughness limit, have also been obtained for gold films deposited by electron beam evaporation. 42 In this case, force measurements were only possible down to 12 nm separations due to jump to contact because of capillary forces, while the estimated distance upon contact via height histogram analysis from AFM images was determined to be d 0 = 7.5 ± 1 nm.…”

Section: Direct Bonding and Surface Roughnessmentioning

confidence: 75%

“…Indeed, direct bonding has also become known as van der Waals bonding: Bonding without glue is performed under ambient conditions. Such a bond can only be achieved under strict conditions: 28,41 the geometrical shape of the elements must be optimally congruous;…”

Section: Direct Bonding and Surface Roughnessmentioning

confidence: 99%

See 1 more Smart Citation

Roughness correction to the Casimir force at short separations: Contact distance and extreme value statistics

Broer,

Palasantzas,

Knoester

et al. 2012

Preprint

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So far there has been no reliable method to calculate the Casimir force at separations comparable to the root-mean-square of the height fluctuations of the surfaces. Statistical analysis of rough gold samples has revealed the presence of peaks considerably higher than the root-mean-square roughness. These peaks redefine the minimum separation distance between the bodies and can be described by extreme value statistics. Here we show that the contribution of the high peaks to the Casimir force can be calculated with a pairwise additive summation, while the contribution of asperities with normal height can be evaluated perturbatively. This method provides a reliable estimate of the Casimir force at short distances, and it solves the significant, so far unexplained discrepancy between measurements of the Casimir force between rough surfaces and the results of perturbation theory. Furthermore, we illustrate the importance of our results in a technologically relevant situation.

show abstract