We report on a near-field spectroscopic study of single V-shaped In x Ga 1Ϫx As/GaAs quantum wires. With subwavelength resolution, the emission from single In x Ga 1Ϫx As wires and connecting planar quantum wellsseparated by 250 nm-are individually resolved. The contributions of both monolayer height fluctuations on a 100 nm length scale and of short range compositional disorder to the localization of excitons in V-shaped quantum wires are separately identified and their implications for far-field PL spectra discussed. An upper limit for the migration length of the photogenerated excitons within the GaAs barrier layers of 250 nm is determined. ͓S0163-1829͑99͒01740-3͔During the last decade, quasi-one-dimensional ͑1D͒ semiconductor nanostructures-quantum wires-grown on patterned, V-shaped substrates ͑V-QWR͒ have attracted considerable interest, 1 partly due to their fundamental importance, and partly in view of their potential application in advanced optoelectronic devices. In particular, structures based on In x Ga 1Ϫx As are interesting candidates for applications in optical communications and model systems for studying the impact of the two-dimensional quantum confinement on the fundamental optical and electronic properties of 1D semiconductor nanostructures. [2][3][4][5] Much of the information on the optical and electronic properties of V-QWRs has been obtained from photoluminescence studies. In such experiments, the distance between adjacent V-QWRs ͑typically between 0.5 and 1 m͒ is generally smaller than the achieved spatial resolution, leading to the investigation of ensembles of up to 100 nanostructures. In order to reduce the pronounced inhomogeneous broadening in such ensembles and to elucidate the intrinsic 1D properties, experiments on single QWRs using microscopy techniques providing sub-micron spatial resolution are particularly desirable. A powerful candidate is near-field scanning optical microscopy 6,7 ͑NSOM͒ with resolution on the order of 100 nm. The potential of low-temperature nearfield spectroscopy for the microscopic analysis of semiconductor nanostructures has been demonstrated in experiments on quantum wires fabricated by the cleaved edge overgrowth technique 8,9 and on patterned high-index (311)A GaAs surfaces, 10,11 in the latter structures also in combination with picosecond time-resolved techniques. 12 In this paper, we report on a near-field photoluminescence study of V-groove quantum wires. Combining subwavelength spatial and spectral resolution, the emission from single In x Ga 1Ϫx As V-QWRs is spatially and spectrally resolved. Monolayer height fluctuations on a 100-nm length scale and short range compositional disorder are identified as the dominant disorder mechanisms that result in a spectral broadening of far-field PL spectra.In x Ga 1Ϫx As/GaAs V-QWR samples were grown by subatmospheric pressure metal-organic chemical-vapor deposition ͑MOCVD͒ at 650°C on a patterned ͑100͒, undoped GaAs substrate. 13 The patterned V-grooves exhibit a depth and periodicity of 250 and 500 nm, res...