Freiheitsgradregularisierte Entfaltung von Messdaten aus AFM-Sondermodi  DoF-Restricted Deconvolution of Measured Data from AFM Special Modes

Nestler, Rico; Machleidt, T.; Franke, K.; Sparrer, E.

doi:10.1524/teme.2008.0885

Cited by 3 publications

(1 citation statement)

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“…In order to solve this problem, a better AFM system or a more complex restoration algorithm must be used. The latter method is demonstrated in [13]. A complex restoration algorithm called the 'pixonen method' was tested in that work.…”

Section: Discussionmentioning

confidence: 99%

Deconvolution of Kelvin probe force microscopy measurements—methodology and application

Machleidt

Sparrer

Kapusi

et al. 2009

Meas. Sci. Technol.

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Kelvin probe force microscopy (KPFM) is a method to detect the surface potential of microand nanostructured samples using a common atomic force microscope (AFM). The electrostatic force has a very long range compared to other surface forces. By using AFM systems under ambient conditions, KPFM measurements are performed using a non-contact regime at surface distances greater than 10 nm. This paper deals with a method to deconvolve the measured KPFM data with the objective to increase the lateral resolution. The KPFM signal is a convolution of an effective surface potential and a microscopic intrinsic point spread function, which allows the restoration of the measured data by linear deconvolution. In contrast to other papers [4], we have developed a new method to use the measured AFM tip shape as a basis to construct the point spread function. The linear shift-invariant channel is introduced as a signal formation model and a Wiener-supported deconvolution algorithm is applied to the measured data. The new method was demonstrated on a nanoscale test stripe pattern for lateral resolution and calibration of length scales (BAM-L200) manufactured by the Federal Institute for Materials Research and Testing, Germany. For the first time, a two-dimensional deconvolution of the KPFM data was able to be demonstrated. An increase in the lateral resolution compared to Strassburg et al (2005 Rev. Sci. Instrum. 76 083705) was accomplished. The results demonstrate the necessity of deconvolving the virtually topography-free probe data under ambient conditions.

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Section: Discussionmentioning

confidence: 99%