Frequency dependence of electron temperature in hollow cathode-type discharge as measured by several different floating probe methods

Abstract

Frequency dependence of electron temperature in hollow cathode-type discharge as measured by several different floating probe methods To cite this article: Shuichi SATO et al 2018 Plasma Sci. Technol. 20 085405 View the article online for updates and enhancements. Related content Floating harmonic probe measurements in the low-temperature plasma jet deposition system M Zanáška, Z Hubika, M ada et al.-Improved RF-driven probe method for RF discharge plasma diagnostics A Ohsawa, M Ohuchi and T Kubota-Effect of finite electrode area ratio on highfrequency Langmuir probe measurements M Shimoyama, K-I Oyama, T Abe et al.

Novel Plasma Diagnostic Measurement of Electron Temperature and Electron Density Using Tone Burst Wave

“…The discharge current increased as the bias voltage increased and shows a nonlinear current-voltage curve. This nonlinear curve for the discharge current agreed with the measurements reported in an earlier study [21], [22]. The measured current-voltage characteristics were slightly slower for the low-voltage small current than for the high-voltage large current.…”

“…Sinusoidal tone burst waveforms with frequencies of 50 kHz and voltages from 10 to 20 V pp (5-10 V in amplitude) were applied and monitored using a digital oscilloscope (DPO 2024, Tektronix Company, Tokyo, Japan). Stable values were obtained at a frequency of 50 kHz in our previous study [21], [22]. The electrometer switch was turned off, as shown in Fig.…”

“…For the proposed tone burst floating probe method and simple previous floating probe method [21], [22], ac voltage was applied using a function generator (AFG 3022B, Tektronix Company, Tokyo, Japan) through an intermediary 0.001-μF blocking capacitor. Sinusoidal tone burst waveforms with frequencies of 50 kHz and voltages from 10 to 20 V pp (5-10 V in amplitude) were applied and monitored using a digital oscilloscope (DPO 2024, Tektronix Company, Tokyo, Japan).…”

“…A summary of the previous floating potential ac diagnostic method is given as follows. This is a simple condensed version of the explanation from 2016 [21], [22].…”

“…Various methods for measuring plasma parameters have been reported, including the electrostatic probe method [14], high-frequency probe method [15], [16], microwave measurement method [17], particle measurement method [18], spectroscopy method [19], and laser measurement method [20]. Among such research backgrounds, we have been studying the floating probe method [21], [22]. This method is different from the Langmuir probe method [see Fig.…”