“…2550 °C) [ 1 ]. Out of all PVD methods, the most used methods are direct current magnetron sputtering (DCMS) [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ] and radiofrequency magnetron sputtering (RFMS) [ 9 , 11 , 12 , 13 , 14 , 15 ] with Ar. Reactive sputtering of W, C, or WC from a target, in the presence of hydrocarbon [ 2 ] or other added gases [ 3 , 4 , 14 ], is used, too.…”