FTIR Spectroscopy Characterization of Si-C bonding in SiC Thin Film prepared at Room Temperature by Conventional 13.56MHz RF PECVD

Abstract

SiC thin film has been synthesized by using conventional 13.56MHz radio frequency plasma enhanced chemical vapour deposition (PECVD). The mixture of silane (SiH4) and methane (CH4) were used as precursor gases while hydrogen as carrier gas. The SiH4/CH4 ratio and the substrate temperature have been varied in order to examine the reaction of the active species which can produce the Si-C bonding in the deposited film. FTIR spectroscopy was used to analyse the type of bonding and particularly to confirm the existence of Si-C bonding by comparing the spectrums obtained from deposited thin film samples and standard reference sample of bulk SiC single crystal wafer. The existence of Si-C bonding was confirmed and it was slightly shifted from the bulk SiC wafer at around 722cm-1 and 817cm-1.

One-step synthesis of fluorescent silicon quantum dots (Si-QDs) and their application for cell imaging

“…37 Si-Si bonding corresponds to the absorbance around 520 cm À1 . 38 Despite the fact that residual byproducts of the reactions may interfere with the FTIR results, the existence of diverse surface terminations was evidenced.…”

Synthesis of cellulose acetate from rice husk cellulose by ultrasound-assisted acetylation

“…The peak of 3336.8 cm -1 and 2892.4 cm -1 show the stretchings of H-bonded -OH groups and methyl and methylene units. Rice husk has a high content of silica, but the wavenumber of 722 cm -1 and 817 cm -1 (Si-C bond) are not found, the cellulose obtained had no content of silica (Omar et al 2012)…”

Self-Crosslinkable Pressure-Sensitive Adhesives from Silicone-(Meth)acrylate Telomer Syrups

“…To determine the presence of TES in the dry telomers, post-reaction mixtures were heated in a vacuum dryer at 60 • C and 10 mm Hg for 1 h. In the spectra of the obtained materials, absorbance was searched for at a wavelength of about 720 cm −1 (characteristic for vibrations of Si-C bonds) using FTIR spectroscopy (Nexus FT-IR, Thermo Nicolet, New Castle, DE, USA) [32].…”

“…To confirm the incorporation of triethylsilane into the oligomeric chains, FTIR analysis of the dry telomers and reference copolymer was performed. For this purpose, unreacted monomers were evaporated from the syrups by heating them in a vacuum dryer (at 60 • C and 10 mm Hg) for 1 h. The IR absorption band corresponding to the stretching vibration of the Si-C bond and located around 720 cm −1 [32] was detected both for pure TES and the synthesized telomers. However, it was not detected for the reference sample.…”