Abstract:This paper reports on the development of a SPAD device and its subsequent use in an actively quenched single photon counting imaging system, and was fabricated in a UMC 0.18μm CMOS process. A low-doped p-guard ring (t-well layer) encircling the active area to prevent the premature reverse breakdown. The array is a 16x1 parallel output SPAD array, which comprises of an active quenched SPAD circuit in each pixel with the current value being set by an external resistor R Ref =300 kΩ. The SPAD I-V response, I D wa… Show more
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