Fully integrated magnetically actuated micromachined relays

Taylor, W.P.; Brand, Oliver; Allen, Mark G.

doi:10.1109/84.679353

Cited by 135 publications

(74 citation statements)

References 22 publications

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“…Once the actuation force is removed, the structures return to the previous state subject to mechanical restoring force. This is the case for some of the switches presented in the previous section [129,132,136]. Other devices, instead, use a counter-actuation force that pushes the mechanical structures away from the contact or to another contact depending on the throws of the switch.…”

Section: Performance Trendsmentioning

confidence: 99%

“…Copyright 1997 IEEE. [132] The first of these devices was reported by Taylor et al back in 1998 [132], as a follow-up on their previous work [133]. The authors specifically address the incompatibility of previously reported magnetic microrelays for IC integration and propose a device that is fully integrated and comprises a single-layer coil that actuates an upper movable magnetic structure.…”

Section: Examples Of Magnetic Mems Switches Reported In the Literaturementioning

confidence: 99%

“…The magnetic movable plate is attracted to the substrate when a current is passed in the meander coil to generate a magnetic pulling force. Reprinted with permission from [132]. Copyright 1998 IEEE.…”

Section: Examples Of Magnetic Mems Switches Reported In the Literaturementioning

confidence: 99%

“…A schematic of the device is presented in Figure 9. [132]. The magnetic movable plate is attracted to the substrate when a current is passed in the meander coil to generate a magnetic pulling force.…”

Section: Examples Of Magnetic Mems Switches Reported In the Literaturementioning

confidence: 99%

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Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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Section: Performance Trendsmentioning

confidence: 99%

Section: Examples Of Magnetic Mems Switches Reported In the Literaturementioning

confidence: 99%

Section: Examples Of Magnetic Mems Switches Reported In the Literaturementioning

confidence: 99%

Section: Examples Of Magnetic Mems Switches Reported In the Literaturementioning

confidence: 99%

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Integrated Magnetic MEMS Relays: Status of the Technology

2014

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“…With the advent of these resists a new technology for fabricating high aspect ratio microstructures has emerged, the so-called UV depth lithography or UV-LIGA method. This technique has been used to develop a variety of magnetic microactuators, such as, for example, scanning mirrors [13] and relays [14]. UV depth lithography also promises to provide an excellent technological basis for the development of linear and rotatory magnetic micromotors.…”

Section: Introductionmentioning

confidence: 99%

Electromagnetic Micromotors—Design, Fabrication and Applications

Büttgenbach

2014

Micromachines

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Abstract:Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, large deflections, low driving voltages resulting from low input impedances and robustness under harsh environments. This paper reviews the comprehensive research on the design, fabrication and application of electromagnetic micromotors performed in our laboratory over the past years.

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Micromachined Antennas

2002

RF MEMS and Their Applications

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Printed and bound in Great Britain by Biddles Ltd, Guildford and King's Lynn This book is printed on acid-free paper responsibly manufactured from sustainable forestry in which at least two trees are planted for each one used for paper production.xii PREFACE fabrication technologies can help realize high Q micromechanical filters for frequencies up to and beyond 10 MHz, and micromachined surface acoustic wave (SAW) filters filling the gap up to 2 GHz. Fabrication processes for all these devices and their relative advantages are taken up extensively in this book. In addition, a brief description of packaging approaches that may be extended for these devices is also included for the sake of comprehensiveness in coverage.We have endeavoured to present these topics so as to guide graduate students interested to do research in microfabrication techniques and their applications. It is therefore envisaged that parts of this books would form the curricula of electrical and mechanical engineering, applied physics or materials science departments. In addition, this would also serve as a reference book for practicing researchers in these areas for further widening the scope of their research.Materials for this book have been taken from an advanced level course offered at Pennsylvania State University recently on RF MEMS, and many short courses presented across the world. Valuable comments from the participants of these courses have helped in evolving the contents of this book and are greatly appreciated. In particular we also wish to thank many of our colleagues and students, Taeksoo Ji, Yanan Sha, Roopa Tellakula, Hargsoon Yoon, and Bei Zhu, at the Center for Electronic and Acoustic Materials and Devices for their contributions in preparing the manuscript for this book.We would like to thank Professors Vasundara V. Varadan and Richard McNitt for their support and encouragement. Our thanks are also due to our families, in particular Nisy John, for bearing with our preoccupation in preparing this manuscript. We are also indebted to various researchers for their valuable contributions cited in this book.We are also grateful to the publisher's staff for their support, encouragement and willingness to give prompt assistance during this book project.

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Fully integrated magnetically actuated micromachined relays

Cited by 135 publications

References 22 publications

Integrated Magnetic MEMS Relays: Status of the Technology

Integrated Magnetic MEMS Relays: Status of the Technology

Electromagnetic Micromotors—Design, Fabrication and Applications

Micromachined Antennas

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