Fully integrated System-On Chip gas sensor in CMOS technology

Gamauf, Christoph; Siegele, Martin; Nemecek, A.; Mutinati, Giorgio C.; Steinhauer, Stephan; Brunet, E.; Köck, Anton; Kraft, Jochen; Siegert, J.; Schrank, Franz

doi:10.1109/icsens.2013.6688155

Cited by 7 publications

(4 citation statements)

References 10 publications

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“…It is expected that sensors with fewer sensing elements can be used to recognize more gas species, allowing for sensor miniaturization and a powerful gas recognition capability. Generally, most chemiresistive-type gas sensors need to be constructed as arrays consisting of multiple sensing elements to expand the feature variables for better multitarget gas recognition, e.g., refs − . On the other hand, a single chemiresistive gas sensor often identifies a limited number of target gases or a class of gases, e.g., refs and .…”

Section: Resultsmentioning

confidence: 99%

A Strategy for Multigas Identification Using Multielectrical Parameters Extracted from a Single Carbon-Based Field-Effect Transistor Sensor

Shi,

Tang,

et al. 2024

ACS Sens.

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Given the widespread utilization of gas sensors across various industries, the detection of diverse and complex target gases presents a significant challenge in designing sensors with multigas detection capability. Although constructing a sensor array with widely used chemiresistive gas sensors is one solution, it is difficult for a single chemiresistive gas sensor to simultaneously detect different gases, as it can only detect a single target gas. The intrinsic reason for this bottleneck is that chemiresistive gas sensors rely entirely on the resistivity as the unique parameter to evaluate the diverse gas sensing properties of sensors, such as sensitivity, selectivity, etc. Herein, a fieldeffect transistor (FET) with abundant electrical parameters is employed to prepare a gas sensor for the detection of a variety of gases. Semiconducting carbon nanotubes (CNTs) are selected as the channel material, which is modified by Pd nanoparticles to enhance the gas sensing properties of the sensors. By extracting various electrical parameters such as transconductance, threshold voltage, etc. from the transfer characteristic curves of FET, a correlation between multielectrical parameters and various gas detection information is established for subsequent data analysis. Through the utilization of the principal component analysis algorithm, the identification of six gases can be finally achieved by relying solely on a single carbon-based FET-type gas sensor. We hope our work can solve the bottleneck of multigas identification by a single sensor in principle and is expected to reduce the system complexity and cost caused by the design of sensor arrays, offering a valuable guidance for multigas identification technology.

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Section: Resultsmentioning

confidence: 99%

A Strategy for Multigas Identification Using Multielectrical Parameters Extracted from a Single Carbon-Based Field-Effect Transistor Sensor

Shi,

Tang,

et al. 2024

ACS Sens.

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“…The spray pyrolysis technique is a simple and flexible process and is suitable for cost efficient fabrication of gas sensing devices. We have demonstrated that this process is suitable for heterogeneous integration of SnO2 gas sensing layers with CMOS fabricated μhp chips as System-On-Chip [2,3]. In this paper we show that nanocrystalline SnO2 gas sensors can be optimized by proper functionalization with bimetallic NPs which is a most promising approach for the realization of multi-parameter sensing devices.…”

Section: Introductionmentioning

confidence: 93%

Optimization of CMOS Integrated Nanocrystalline SnO2 Gas Sensor Devices with Bimetallic Nanoparticles

Mutinati

Brunet

Koeck

et al. 2014

Procedia Engineering

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“…Though there are plenty of reports on nanostructure-based hydrogen sensors, the incompatibility of bulk processes in complementary metal oxide semiconductor (CMOS) technology inhibits their integration into chip electronics. , Since microheater optimization for MEMS devices to advance toward CMOS technology is very challenging, there is a need for low-temperature-operating CMOS-compatible techniques to yield good sensors. , We have chosen nickel oxide, which shows very good sensing properties, particularly for hydrogen gas. Besides, Ni metal and its electronic family (Pd and Pt) show a high affinity for hydrogen. , Especially when these metals are in nanoscale dimensions, the kinetics and response both are significantly enhanced. , Moreover, unlike other n-type materials such as SnO 2 , ZnO is highly likely to have a selectivity to gases depending on the transition metal and its coordination …”

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confidence: 99%

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confidence: 99%

Complementary Metal Oxide Semiconductor-Compatible Top-Down Fabrication of a Ni/NiO Nanobeam Room Temperature Hydrogen Sensor Device

Urs

Sahoo

Bhat

et al. 2022

ACS Appl. Electron. Mater.

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Miniaturized chemical sensors are of immense utility for low-power-consuming, on-chip-integrable functional devices. In this letter, complementary metal oxide semiconductor (CMOS)-compatible fabrication of a suspended Ni/NiO nanobeam gas sensor device showing a selective response to hydrogen gas at room temperature is reported. The dimensions of the suspended Ni beam are 100 nm × 1 μm, and the thickness varied from 15 and 20 nm. Further, it is oxidized using either thermal oxidation or plasma oxidation. The selective response obtained is a nearly 50% change in resistance for 5000 ppm of H2 at 25 °C in plasma-oxidized-sputtered Ni films. The joule heating results in thermal oxidation viz-a-viz electromigration of Ni metal self-functionalization and helps in the selective response toward hydrogen.

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Fully integrated System-On Chip gas sensor in CMOS technology

Cited by 7 publications

References 10 publications

A Strategy for Multigas Identification Using Multielectrical Parameters Extracted from a Single Carbon-Based Field-Effect Transistor Sensor

A Strategy for Multigas Identification Using Multielectrical Parameters Extracted from a Single Carbon-Based Field-Effect Transistor Sensor

Optimization of CMOS Integrated Nanocrystalline SnO2 Gas Sensor Devices with Bimetallic Nanoparticles

Complementary Metal Oxide Semiconductor-Compatible Top-Down Fabrication of a Ni/NiO Nanobeam Room Temperature Hydrogen Sensor Device

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