2009
DOI: 10.1016/j.mee.2008.08.007
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Future challenges of flash memory technologies

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Cited by 153 publications
(94 citation statements)
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“…[94][95][96][97] Graphene flash memory (GFM) has been fabricated, exhibiting a wide memory window at low voltage, as shown in Fig. 4a and b.…”
Section: Electronic Circuitsmentioning
confidence: 99%
“…[94][95][96][97] Graphene flash memory (GFM) has been fabricated, exhibiting a wide memory window at low voltage, as shown in Fig. 4a and b.…”
Section: Electronic Circuitsmentioning
confidence: 99%
“…Nevertheless, there are three critical limitations that prevent further technology scaling on FG flash memory, i.e. (1) severe stress induced leakage current (SILC) triggered if the tunnel oxide layer is scaled to less than 8 nm; (2) gate coupling ratio of minimum 0.6 has to be met in order for control gate of FG flash memory to properly exert control to FG and the channel; (3) severe cellto-cell interference [1][2][3][4][5][6][7][8]. As compared to FG flash memory, NBCTF memory enables better downscaling of the tunnel oxide layer while still preserving overall good data retention performance.…”
Section: Introductionmentioning
confidence: 99%
“…Tunnel oxide nitridation (TON) is one of the approaches applied together with the downscaling of tunnel oxide layer in order to enhance the immunity of NBCTF memory to Fowler-Nordheim (FN) stress induced damages in tunnel oxide layer. By implementing various wet or dry nitridation processes, TON is done by incorporating nitrogen content into the tunnel oxide layer to achieve larger memory window and better hardening towards the damages due to extensive program/erase P/E) cycling stress through FN injection [1][2][3][4][5][6][7][8][9][10]. Nevertheless, TON was also found to result in several critical reliability issues such as Fermi-level defects and mid-gap defects.…”
Section: Introductionmentioning
confidence: 99%
“…Scaling the FG cell size much below than 30 nm is unlikely as several scaling challenges are anticipated, solutions to which are still unknown [4]. The key issues facing FG technology today are the following: 1) scaling of the tunnel oxide (TO) and interpoly dielectric thickness; 2) scaling of the lateral dimensions which increases coupling between the adjacent cells; and 3) the loss of control gate (CG)-FG coupling due to the planar FG structure required at sub-30-nm dimensions [5].…”
Section: Introductionmentioning
confidence: 99%