Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope

Xiao, Qijun; Li, S.-Y.; Chen, W.-Y.; Cao, Feng; Zhang, W.-P.

doi:10.1049/el.2009.0874

Cited by 21 publications

(9 citation statements)

References 4 publications

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“…Preliminary tests have shown that the qualified rate of the fabricated gyroscopes was high. At present, the initial levitation of the rotor has been demonstrated (Xiao et al 2009), and stable suspension and rotation of the microgyro are ongoing and will be further reported. For higher microfabrication precision and smaller radial gap spacing formation, X-ray LIGA technique will be employed in further research.…”

Section: Discussionmentioning

confidence: 83%

Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

et al. 2009

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A micromachined electrostatically suspended gyroscope, with a wheel-like rotor housed by top stator and bottom stator, using UV-LIGA microfabrication technology, was presented. The designed structure and basic operating principle of the gyroscope are described. The key steps in the fabrication process, such as wet etching of Pyrex glass pits for soldering, and integration of thick nickel structures by removal of SU-8 mold, were considered in detail and well solved. Cr/Pt/photoresist was used as etching mask and the etched pits, in depth of near 30 lm, with aspect ratio (depth to undercutting) of 0.75, were obtained. With metal foundations constructed for consolidation, successful integration of the nickel structures, in thickness of 200 lm, was achieved by successful removal of the SU-8 mold using oleum. After the two stators and the rotor were fabricated separately, they were assembled and soldering bonded to form axial and radial small gaps, hence, the initial prototype of the microgyroscope was realized. The key techniques described in this paper can be applied to fabrication of other micro devices. The metal foundation method, associated with removal of SU-8 mold by oleum, is expected to make SU-8 wider applications in making integrated microstructures with fabricated circuitry on the same chip.

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Section: Discussionmentioning

confidence: 83%

Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

et al. 2009

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“…According to the fuzzy rules and Mamdani algorithm, a look-up table (LUT) for fuzzy control can be calculated with the following formula [6] (10)…”

Section: Automatic Control Systemmentioning

confidence: 99%

An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

Zhao

Liu

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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This paper reports a novel method to accomplish automatic and real-time mode-matching control for a MEMS vibratory gyroscope based on fuzzy and neural network algorithms. Experimental results demonstrate that it only needs about 8 seconds to fulfil mode-matching automatically in the fuzzy control system, and a mismatching error lower than 0.32Hz is achieved over the temperature range from -40°C to 80°C in the neural network real-time control system. The scale factor of the mode-matched gyroscope with the closed loop controlled sense mode is measured to be 65.9 mV/deg/s with nonlinearity about 0.03%, and the bias instability and the angle random walk (ARW) are evaluated to be 0.68 deg/h and 0.028 deg/h 1/2 , respectively.

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“…However, many problems also occurred, such as difficulty to release the silicon rotor, ohmic contact problem, and the RIE lag effect [2]. Using both UV-LIGA and surface micromachining techniques, we have designed and fabricated a MESG with a wheel-like nickel rotor [3], and initial levitation control of the rotor along the z-axis direction has been realised either using a fuzzy tuning PI control [4] or adaptive levitation control using a single neuron [5]. However, 5-DOF stable levitation of the rotor, three translations and two inplane rotations, were not reliably achieved, because capacitances of the suspension electrode pairs locating at only one outgoing line of the common electrodes were larger than those of the other suspension electrode pairs owing to uneven distribution of the inside interconnections of three-phase rotation electrodes [6].…”

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confidence: 99%

“…The displacement of the rotor is detected by the differential capacitance method and then fed back to the DSP controller to produce the control voltage, which plus the bias voltage is then applied to the corresponding electrodes to make the rotor suspend stably in the null place. The detection and control system for levitation and rotation of the rotor mainly consists of a micro-displacement detection unit, a digital signal processor (DSP) control unit and control combining circuits [4].…”

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confidence: 99%

Hybrid microfabrication and 5-DOF levitation of micromachined electrostatically suspended gyroscope

et al. 2011

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A newly designed electrostatically suspended rotational microgyroscope, with optimised electrode structures and interconnections, is presented. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures using UV-LIGA, DRIE of silicon rotor, microassembly and solder bonding, are employed to fabricate this device. Five-degree-offreedom stable levitation control of the rotor, with fast initial levitation process and good time synchronisation at the null position for each axis, has been demonstrated.Introduction: A micromachined electrostatically suspended gyroscope (MESG), also as a force balance tri-axis accelerometer, is one of the most important candidates towards high performance and multi-axis integrated micro inertial sensors [1, 2]. However, relatively little work has been done to realise it, owing to the tough techniques required, such as microfabrication, high vacuum packaging, detection and control of six degrees of freedom (DOF) of the rotor at high constant rotational speed. The microfabrication is challenging, because very small axial and radial gaps, for electrostatic forces generation and capacitive detection, should be formed between the rotor and the stator electrodes. Recent work for fabrication of this gyroscope relied on deep reactive ion etching (DRIE) of silicon and glass/silicon/glass stack bonding [1,2]. However, many problems also occurred, such as difficulty to release the silicon rotor, ohmic contact problem, and the RIE lag effect [2].

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Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope

Cited by 21 publications

References 4 publications

Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

Hybrid microfabrication and 5-DOF levitation of micromachined electrostatically suspended gyroscope

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