Abstract-Off-axis ellipsoid reflector based off-focus configuration for deastigmatism and circularization of an elliptical Gaussian beam is proposed. Mostly used off-axis ellipsoid reflector based conventional configuration is constructed by aligning the incident direction directed to one focus of the ellipsoid, which reflect the output beam to the another focus of the ellipsoid. However, such configuration is unavailable to deastigmatize and circularize an elliptical Gaussian beam. Therefore, the coupling efficiency between the reflected beam and an essentially circular beam is not well satisfied. In this case, an off-axis ellipsoid reflector based off-focus configuration is proposed to obtain better coupling efficiency. Different from the conventional configuration, in the proposed off-focus configuration, the incident beam direction is diverged from one focus of the ellipsoid. As a result, the coupling efficiency of no less than 99.9% (as compared with coupling efficiency of about 94.2% based on conventional configuration) can be obtained, which is verified with numerical calculations.