“…The inevitable heteroepitaxy of GaN on foreign substrates like sapphire, Si or SiC results in stress, and generates high density of threading dislocations (TD, $ 10 8 -10 10 cm À 2 ), cracks and other defects (stacking faults, voids, inversion domains, point defects) due to the large lattice mismatch and thermal expansion coefficient incompatibility, which deteriorates the optical and electrical properties of GaN-based devices [5,6]. Ever since Amano et al successfully demonstrated the growth of high quality crack-free GaN epilayers on sapphire substrate using an AlN buffer layer a variety of strain compensating layers like low-temperature GaN, SiN, AlN-GaN superlattices, AlGaN and rare earth oxides have been used to mitigate the stress and to reduce the TD density in GaN epilayers [1,[7][8][9][10]. Use of these buffer layers, to some extent, has shown considerable improvement in the crystalline quality of GaN epilayers and their device performances, yet there still exist many defects and thus, the growth of high-quality GaN raises many interrogations and requires further research.…”