2001
DOI: 10.1143/jjap.40.2996
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GaN and InGaN Metal-Semiconductor-Metal Photodetectors with Different Schottky Contact Metals

Abstract: The characterizations of n-type doped GaN, p-type doped GaN and n-type doped In0.2Ga0.8N Schottky metal-semiconductor-metal (MSM) photodetectors were reported. The epilayers were grown on sapphire by metalorganic chemical vapor deposition (MOVCD). Schottky contacts were fabricated using Au, Ti, Ni and Pt metals. The dark and illuminated current–voltage characteristics of GaN and InGaN MSM photodetectors with different Schottky metals were studied. The n-GaN MSM photodetectors with Au Schottky contacts showed b… Show more

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Cited by 95 publications
(30 citation statements)
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“…In x Ga 1−x N alloy system has received a great deal of interest due to an important number of applications such as light emitting diodes [1], laser diodes [2], visible blind photodetectors [3], and heterostructure field effect transistors [4]. For these applications, it is important to investigate the material's band gap as a function of its composition.…”
Section: Introductionmentioning
confidence: 99%
“…In x Ga 1−x N alloy system has received a great deal of interest due to an important number of applications such as light emitting diodes [1], laser diodes [2], visible blind photodetectors [3], and heterostructure field effect transistors [4]. For these applications, it is important to investigate the material's band gap as a function of its composition.…”
Section: Introductionmentioning
confidence: 99%
“…[13][14][15][16][17][18][19][20][21][22][23][24][25][26][27] Briefly, trimethylaluminum, trimethylgallium, trimethylindium, and ammonia were used as aluminum, gallium, indium, and nitrogen sources, respectively. Biscyclopentadienyl magnesium (CP 2 Mg) and disilane (Si 2 H 6 ) were used as the p-type and n-type doping sources, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…Since GaN possesses a direct wide band gap (E g ¼ 3.4 eV), its associated properties make it a promising candidate for ultraviolet (UV) detector application. To date, several groups have reported encouraging results for GaN-based photodetectors, such as the p-n junction diode [1], the p-i-n diode [2], and the metal-semiconductor-metal (MSM) photodetector [3]. Among these structures, MSM-based configuration is considered an attractive choice for fabricating UV detectors, given their fabrication simplicity and suitability for the monolithic integration of an optical receiver.…”
Section: Introductionmentioning
confidence: 99%