The authors report the fabrication of a deep-ultraviolet (deep-UV) sensitive a-IGZO thin-film-transistor (TFT) with a Ta 2 O 5 gate dielectric. It was found that carrier mobility, threshold voltage and subthreshold swing were 48.5 cm 2 Vs, 1.25 V and 0.49 V/decade, respectively, when measured in dark. It was also found that measured current increased from 1 5 10 9 A to 5 56 10 5 A, as we illuminated the sample with = 250 nm UV light when V G was biased at 0 V. Furthermore, it was found that deep-UV-to-visible rejection ratio could reach 1 0 10 6 for the fabricated Ta 2 O 5 /a-IGZO TFT.Index Terms-a-IGZO, solar-blind ultraviolet (UV) photodetctor, Ta 2 O 5 , thin-film-transistor (TFT).