“…Recently, rapid progress has been found in the fabrication of GaN-based optoelectronic and microelectronic devices such as GaN-based light-emitting diodes [LEDs] [1], laser diodes [LDs] [2], Solar-blind MSM-photodetectors [3], metal-semiconductor field effect transistor [MESFETs] [4], modulation-doped field effect transistor [MODFETs] [5], heterostructure field effect transistors [HFETs] [6] and high electron mobility transistors [HEMTs] [7,8]. Especially, the performance and reliability of these devices have been improved with high quality ohmic and Schottky rectifiers.…”