ABSTRACT:We report on the monolithic integration of GaSb and InAs fins on on-axis 300 mm Si (001) by metal-organic chemical vapor deposition. The thickness of the GaAs/Si (001) fins used as a template is optimized to allow the formation of {111} facets and the confinement of defects generated at the GaAs/GaSb and GaAs/InAs interfaces by means of the aspect ratio trapping technique. Anti-phase domains are avoided via a careful design of the GaAs/Si interface.Threading dislocations in GaSb are controlled through the formation of an interfacial misfit dislocation array along the GaSb/GaAs and interfaces. Defects on InAs are controlled through the promotion of a 2-dimensional growth, which spontaneously occurs on GaAs {111} planes. Results represent a step forward towards the integration of III-V nanoscale photonic and electronic components on a Si complementary metal-oxide-semiconductor compatible platform using a precisely engineered GaAs on Si template.2