Gas compression and dissolution in closed end tubes by applying pressure (Liquid infiltration characteristics into fine structure by pressure)

Abstract

Liquid infiltration into small scale structure is important process in the various manufacturing process. However, there are lack of experimental study, especially, the effect of pressure, even in the real process utilized the external pressure like droplet impact. In this study, we examined the liquid infiltration properties from the millimeter to micrometer scale into closed end tubes by applying pressure under two conditions, i.e. gradual and stepwise change, and discussed the gas dissolution effects. As a result, it is found that the amount of dissolved air by applying pressure is small, and it has little effect on the liquid infiltration in millimeter and sub-millimeter size of tubes. The main contribution to the liquid infiltration is gas compression. On the contrary, the micrometer scale of tubes with low aspect ratio, the liquid perfectly infiltrated into small tube by applying three times pressure owing to the gas dissolution. This results indicate that the gas dissolution is the main factor for liquid infiltration into nano-scale structure. Furthermore, we confirmed that the gas compression process well reproduced by the isothermal process.

Observation of liquid infiltration process into closed-end holes by droplet train impingement

“…When d h = 0.1 mm, complete liquid infiltration was achieved on the first pressurization. These results are the same as those reported by Sanada et al (2016). In a tube of about 1 mm diameter, liquid infiltration cannot be achieved despite high pressure.…”

“…In previous work, we experimentally investigated the process of a liquid entering a micro tube that is sealed at the tip in a pressure vessel. We showed that liquid infiltration into a relatively large tube (about 1 mm in diameter) through pressurization was difficult, and the aspect ratio was important (Sanada et al, 2016). We also showed that the influence of liquid dissolution was limited, even when high pressures were applied.…”

“…First, to investigate the influence of gas dissolution, the liquid infiltration owing to liquid pressurization was tested using a pressure vessel, similar to the experiments of Sanada et al (2016). A schematic diagram of the experimental apparatus used in this experiment is shown in Fig.…”

Particle and pattern discriminant freeze-cleaning method

“…Equation (21) shows that if the FC particle size is larger than this number, particle weight can be ignored. Therefore if the FC particle size is 3.5 μm in diameter, its terminal velocity and time of travel of 100 nm are regarded as the same value as Eqs.…”

“…As reported, water infiltrates the gaps between small patterns via gas dissolution. [19][20][21] The tool and the process developed herein have been used by Tanabe et al 22 to remove particles stuck between small gaps (∼80 nm). A further investigation is required on water infiltration into all gaps with respect to the materials, shape, and surface energy.…”