Gas permeable mold for defect reduction in nanoimprint lithography

Mizui, Kento; Hanabata, Makoto; Takei, Satoshi

doi:10.1117/12.2514790

Cited by 1 publication

(1 citation statement)

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“…Nanoimprint lithography (NIL) is a high resolution (more than 10 nm) and high efficiency lithography technique that employs a patterning technology that involves the deposition and exposure of a low viscosity resist onto a substrate [82]. This process utilises capillary action in which the fluid quickly flows into the lowered pattern mask and the resist will be exposed under UV light for curing.…”

Section: Nanoimprint Lithographymentioning

confidence: 99%

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

et al. 2022

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bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of biomedical devices with high precision and rapid processing since its first R&D breakthrough in the 1980s. To date, several organic including food waste derived nanomaterials and inorganic nanomaterials (e.g., carbon nanotubes, graphene, silica, gold, and magnetic nanoparticles) have steered the development of high-throughput and sensitive bioNEMS/MEMS-based biosensors, actuator systems, drug delivery systems and implantable/wearable sensors with desirable biomedical properties. Turning food waste into valuable nanomaterials is potential groundbreaking research in this growing field of bioMEMS/NEMS. This review aspires to communicate recent progress in organic and inorganic nanomaterials based bioNEMS/MEMS for biomedical applications, comprehensively discussing nanomaterials criteria and their prospects as ideal tools for biomedical devices. We discuss clinical applications for diagnostic, monitoring, and therapeutic applications as well as the technological potential for cell manipulation (i.e., sorting, separation, and patterning technology). In addition, current in vitro and in vivo assessments of promising nanomaterials-based biomedical devices will be discussed in this review. Finally, this review also looked at the most recent state-of-the-art knowledge on Internet of Things (IoT) applications such as nanosensors, nanoantennas, nanoprocessors, and nanobattery.

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Section: Nanoimprint Lithographymentioning

confidence: 99%