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A gas-permeable template has lower mechanical properties compared to non-gas-permeable metal templates. Therefore, it is difficult to mass-produce by increasing the area of the gas-permeable template. In this study, we have developed a new gas-permeable template with cellulose nanofiber (CNF) derivatives added to improve the mechanical properties of gas-permeable templates. The reinforcing effect by the CNF derivative added was investigated by a tensile test. As a result, it was shown that Young’s modulus was increased about 2 to 3 times by the addition of 2-5 wt% CNF derivative. Also, it was confirmed by confocal microscopic images that transferability and gas permeability of the gas-permeable template were not lost even when the CNF derivative was added.

Nanoimprint lithography has been applied to the manufacture of microlenses, antireflection films, and biochips because of its cost reduction advantage. Previously, we demonstrated a gas-permeable template derived from a thermal cross-linkable cellulose derivative with methacrylate (HPC-MOI) that eliminated defects due to the concentration of acetone gas between the template and the imprint material. In this study, we prepared a thermoset cellulose derivative with acrylate as the gas-permeable template (HPC-AOI). The results of Raman spectroscopy and indentation test confirmed that HPC-AOI had a very high cross-linking density when heated for 10 min. The micrographs and three-dimensional (3D) image of the 5 µm line and space pattern in the UV cross-linked material containing a volatile solvent showed that void defects were removed and edges were sharper when the HPC-AOI template was utilized.

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