Improvement of Gas Permeability of Gas Permeable Mold with Lattice Structure for Reduction of Transfer Failure in Photoimprint Lithography

Sugino, Naoto; Kurematsu, Kazuho; Mizui, Kento; Hanabata, Makoto; Takei, Satoshi

doi:10.2494/photopolymer.32.627

Cited by 2 publications

(2 citation statements)

References 10 publications

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“…Despite the relative newness of hybrid (LPBF) manufacturing, state-of-the-art research studies have also provided some early understandings of the separate influences of the additive-subtractive processes. For example, Tamura et al [22] reported on the anisotropic milling forces during hybrid (LPBF) manufacturing of maraging steels, while Sugino et al [23] studied the gas permeability of lattice structures in maraging steel permeable molds. On the additive end, Enemuoh et al [24] measured the density, hardness, and tensile properties of 18Ni-300 maraging steel samples built using hybrid (LPBF) manufacturing with one parameter set that was not disclosed, and is thus difficult to link to the process.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Maraging Steel Produced Using Hybrid Additive/Subtractive Manufacturing

Sarafan

Wanjara

Gholipour

et al. 2021

JMMP

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Hybrid manufacturing is often used to describe a combination of additive and subtractive processes in the same build envelope. In this research study, hybrid manufacturing of 18Ni-300 maraging steel was investigated using a Matsuura LUMEX Avance-25 system that integrates metal additive manufacturing using laser powder bed fusion (LPBF) processing with high-speed machining. A series of benchmarking coupons were additively printed at four different power levels (160 W, 240 W, 320 W, 380 W) and with the integration of sequential machining passes after every 10 deposited layers, as well as final finishing of selected surfaces. Using non-contact three-dimensional laser scanning, inspection of the final geometry of the 18Ni-300 maraging steel coupons against the computer-aided design (CAD) model indicated the good capability of the Matsuura LUMEX Avance-25 system for net-shape manufacturing. Linear and areal roughness measurements of the surfaces showed average Ra/Sa values of 8.02–14.64 µm for the as-printed walls versus 0.32–0.80 µm for the machined walls/faces. Using Archimedes and helium (He) gas pycnometry methods, the part density was measured to be lowest for coupons produced at 160 W (relative density of 93.3–98.5%) relative to those at high power levels of 240 W to 380 W (relative density of 99.0–99.8%). This finding agreed well with the results of the porosity size distribution determined through X-ray micro-computed tomography (µCT). Evaluation of the static tensile properties indicated that the coupons manufactured at the lowest power of 160 W were ~30% lower in strength, 24% lower in stiffness, and more than 80% lower in ductility relative to higher power conditions (240 W to 380 W) due to the lower density at 160 W.

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Section: Introductionmentioning

confidence: 99%

Evaluation of Maraging Steel Produced Using Hybrid Additive/Subtractive Manufacturing

Sarafan

Wanjara

Gholipour

et al. 2021

JMMP

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“…The water permeable porous substrates under the water permeable surface material were fabricated by using a hybrid metal 3D printer (LUMEX Avance-25, Matsuura, Japan) and the standard maraging steel powders with an average particle size of 20–30 μm. The powders were baked and hardened by irradiating them with a 400 W Yb fiber laser using the 3D printer [ 39 , 40 ]. This series of operations was repeated 10 times, and the shape was cut using a cutting process.…”

Section: Methodsmentioning

confidence: 99%

Fabrication of High-Resolution Fine Microneedles Derived from Hydrolyzed Hyaluronic Acid Gels in Vacuum Environment Imprinting Using Water Permeable Mold

Miura

Yamagishi

MIYAZAKI

et al. 2022

Gels

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Hydrolyzed hyaluronic acid high-resolution fine microneedles of 13 µm in diameter and 24 µm in height were fabricated from hydrolyzed hyaluronic acid gels made in mixtures of water using vacuum environment imprint lithography processes with a water permeable mold. The gas traps of water and volatile solvents in the imprint materials cause transfer failure in the conventional water impermeable molds of quartz and metal. However, the water permeable mold allows the use of 67 wt% dilution water with high solubility to increase the fluidity of the hydrolyzed hyaluronic acid during the patterning of high-resolution fine microneedles for cosmetics and pharmaceuticals. This demonstration sets a new paradigm of functional pure gels for high-resolution nano-patterning applications with various cosmetic and pharmaceutical materials containing dilution water using a water permeable mold.

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Improvement of Gas Permeability of Gas Permeable Mold with Lattice Structure for Reduction of Transfer Failure in Photoimprint Lithography

Cited by 2 publications

References 10 publications

Evaluation of Maraging Steel Produced Using Hybrid Additive/Subtractive Manufacturing

Evaluation of Maraging Steel Produced Using Hybrid Additive/Subtractive Manufacturing

Fabrication of High-Resolution Fine Microneedles Derived from Hydrolyzed Hyaluronic Acid Gels in Vacuum Environment Imprinting Using Water Permeable Mold

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