Gas-phase synthesis of hexagonal and cubic phases of aluminum nitride: A method and its advantages

Kudyakova, V. S.; Bannikov, V. V.; Elagin, A. A.; Шишкин, Р. А.; Баранов, М. В.; Бекетов, А. Р.

doi:10.1134/s106378501603010x

Cited by 10 publications

(1 citation statement)

References 7 publications

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“…Magnetron sputtering, vacuum arc discharge, and atmospheric plasma spraying are the methods commonly used to synthesize thin AlN films; − (3) Nitrogen-containing gases interact with highly volatile inorganic aluminum compounds. Chemical vapor deposition is the most representative of the methods, which could synthesize high-purity AlN in one step; − (4) Aluminum compounds interact with nitrogen-containing organic compounds at a synthesis environment with both high temperatures and pressures; (5) Polymorphic transition of AlN methods including conventional phase transformation techniques at ultrahigh pressures, aerosol deposition method, and laser nitriding (LN) method. − …”

Section: Introductionmentioning

confidence: 99%

Numerical Simulation of Rapid Nitriding of Aluminum via Pulsed Laser

Ran

Cheng

et al. 2023

Ind. Eng. Chem. Res.

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To better understand the mechanisms of pulsed laser-assisted synthesis of metal nitride, a numerical model was proposed to simulate the process of laser nitriding of aluminum. The model incorporated various multiphysical processes in the laser nitriding process, including heating, melting and vaporization of aluminum, formation of plasma plume, shielding of laser energy, ionization of nitrogen gas, and the transport of nitrogen in the chemically active state N* (N atoms and N+ ions) inside the aluminum. The simulated results are in good agreement with the existing experimental results in terms of laser intensity, laser impulse, N+ lifetime in plume, and nitrogen diffusion depth in aluminum. The model can well simulate the laser shielding process by plume and the nitriding process of aluminum. Characteristics of the plume expansion, plasma formation, nitrogen ionization, and diffusion were investigated systematically by the developed model. Investigations on the effects of key operating conditions show that the impact of laser wavelength is negligible, while the full-width at half-maximum (FWHM), nitrogen gas pressure, and laser intensity have a significant impact on the laser nitriding process of aluminum. The larger FWHM and larger laser intensity yield a layer with a higher N* concentration and greater thickness. The higher nitrogen gas pressure leads to an increase in N* concentration at the same position.

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