2020
DOI: 10.1007/s42452-020-2050-7
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Gas-sensing properties of ITO materials with different morphologies prepared by sputtering

Abstract: Indium tin oxide (ITO) materials with different morphologies have been fabricated via sputtering technology by adjusting the oxygen flow rate and RF-power. The repeatable and controllable growth conditions of different ITO materials have been achieved. The gas sensors with different ITO materials were fabricated on ceramic tube directly, which have the characteristics of low cost and simple preparation process. Through our analysis, the nanowires have larger specific surface area, more oxygen vacancies and an … Show more

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Cited by 11 publications
(8 citation statements)
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“…In addition, coatings deposited at negative bias potentials had a wavy surface and were rather uniformly distributed across the substrate. According to the literature [28,29] packing density increases with smoothering the surface. That consequence of the nucleation sites formation at more intense argon ion bombardment.…”
Section: Resultsmentioning
confidence: 94%
“…In addition, coatings deposited at negative bias potentials had a wavy surface and were rather uniformly distributed across the substrate. According to the literature [28,29] packing density increases with smoothering the surface. That consequence of the nucleation sites formation at more intense argon ion bombardment.…”
Section: Resultsmentioning
confidence: 94%
“…At 600°C, the average response time and recovery time decreased to 28 and 14 s, respectively [159]. ITO crystalline structure is shown in Figure 17c [162].…”
Section: Indium Tin Oxidementioning
confidence: 97%
“…At 600°C, the average response time and recovery time decreased to 28 and 14 s, respectively [159]. ITO crystalline structure is shown in Figure 17c [162].
Figure 17 Indium tin oxide (ITO): (a) Response and recovery time of ITO variation with annealing temperature, (b) sensitivity of ITO films against relative humidity (reproduced with permission [161] Copyright 2017, Springer Nature) and (c) crystalline structure of ITO (reproduced with permission [162] Copyright 2020, Springer Nature).
…”
Section: Special Consideration For Sensing Materials and Monitoring M...mentioning
confidence: 99%
“…Among them, indium tin oxide (ITO) is a transparent conducting oxide (TCO) with excellent characteristics of high light transmission and low resistivity; thus, it is extensively used in optoelectronic products, including liquid crystal displays [ 4 ], solar cells [ 5 ], flat-panel displays [ 6 ], and light-emitting diodes [ 7 ]. With low resistance and abundant lattice defects on the surface, ITO can also be used as gas sensor materials [ 8 , 9 ]. Furthermore, similar to NiSi nanowires, ITO nanowires may also be used as interconnects in integrated nanoscale devices [ 10 ].…”
Section: Introductionmentioning
confidence: 99%