Porous silicon (PSi) was applied as a supporting substrate for stepwise covalent derivatization of undecylenic acid, N-hydroxysuccinimidyl ester (NHS-ester) and nitrilotriacetic acid (NTA). By taking the advantages of porous silicon as a supporting matrix such as high surface area to volume ratio, infrared transparency, porous semiconductors for laser desorption/ionization mass spectroscopy, and low fluorescence background, a multi-mode detection biochip prototype can be realized. We prepared such a protein microarray by spotting NTA microarray dots on NHS-ester derivatized PSi, converting the rest of chip area into poly(ethylene glycol) background, loading Ni II , and finally affinity-binding histidine-tagged (His-tagged) proteins. With the multi-mode analyses of infrared spectroscopy, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), matrix-assisted laser desorption/ionization mass spectroscopy (MALDI-MS), and fluorescence scanning, two example proteins, His-tagged thioredoxin-urodilatin and His-tagged aprotinin, were well qualified and quantified. porous silicon, microarray, multi-mode, NTA, His-tagged protein