We describe the general synthesis of sub-micron-thick rare-earth/lanthanide sesquioxide (RE 2 O 3 ) films with tailorable pore and grain sizes by polymer templating of hydrated chloride salt precursors. Mesostructured RE 2 O 3 (RE = Sm, Tb-Lu) ceramics with cubic pore symmetry and high surface area (S BET ≥ 50 m 2 •g -1 ) were prepared using different diblock copolymer structure-directing agents and were characterized by a combination of electron microscopy, in situ and ex situ grazing incidence small-angle X-ray scattering, N 2 -physisorption, X-ray photoelectron spectroscopy, X-ray diffraction including Rietveld refinement, and UV-vis spectroscopy. In the present work, we specifically focus on Dy 2 O 3 and Yb 2 O 3 and use both of these materials as model systems to study, among other things, the film formation and microstructure. Our research data collectively demonstrate that (1) record pore sizes of up to 42 nm in diameter can be achieved without the need for swelling agents, (2) the nanostructure can be preserved up to 1000 °C for the heavier oxides, (3) the sizes of the optical band gaps (4.9-5.6 eV) are comparable to those reported for single crystals, (4) the sol-gel derived materials are single phase and adopt the C-type crystal structure, and that (5) and Lu 2 O 3 films (March G 2 parameters of under 0.1). Overall, the synthesis parameters described in this work provide a blueprint for the preparation of thermally stable rare-earth oxide ceramics with both a mesoporous morphology and iso-oriented nanocrystalline walls.