Generation of nano-sized Ar–N2 compound particles by homogeneous nucleation and heterogeneous growth in a supersonic expansion

Bae, Hwang; Kim, Inho; Kim, Euijae; Lee, Jinwon

doi:10.1016/j.jaerosci.2009.11.005

Cited by 15 publications

(10 citation statements)

References 31 publications

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“…The size of the BPs used in this study is on the same order of magnitude as that of the CPs. Refer to the study of Bae et al [ 14 ] for particle size estimation and the works of Lee et al [ 12 ] and Hwang et al [ 13 ] for experimental details.…”

Section: Resultsmentioning

confidence: 99%

“…Despite the success, two practical difficulties using Ar BPs remain: (1) BP size is very sensitive to temperature [ 14 ], so it must be controlled very accurately to achieve size uniformity, and (2) BP velocity is limited by low temperature. Generating BPs at room temperature (RT) would eliminate the need to control temperature and increase BP velocity.…”

Section: Introductionmentioning

confidence: 99%

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Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles

2012

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Removal of nanometer-sized contaminant particles (CPs) from substrates is essential in successful fabrication of nanoscale devices. The particle beam technique that uses nanometer-sized bullet particles (BPs) moving at supersonic velocity was improved by operating it at room temperature to achieve higher velocity and size uniformity of BPs and was successfully used to remove CPs as small as 10 nm. CO2 BPs were generated by gas-phase nucleation and growth in a supersonic nozzle; appropriate size and velocity of the BPs were obtained by optimizing the nozzle contours and CO2/He mixture fraction. Cleaning efficiency greater than 95% was attained. BP velocity was the most important parameter affecting removal of CPs in the 10-nm size range. Compared to cryogenic Ar or N2 particles, CO2 BPs were more uniform in size and had higher velocity and, therefore, cleaned CPs more effectively.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles

2012

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“…In 20M6, this process was discounted for all air constituents except oxygen [9]. In supersonic flow experiments where cluster sizes have been measured, clusters were limited to less than 10 nm, and calculations in pure nitrogen or argon in supersonic flow supported this conclusion [32]. No air data is available.…”

Section: Discussionmentioning

confidence: 99%

“…Since the cluster is composed of several species, surface energy and the free energy barrier for formation of the cluster are lower. According to [32], only saturation vapor pressure, and not supersaturation, is required compared with homogeneous nucleation in the first mechanism. The result is increased nucleation rate compared with single species homogeneous nucleation.…”

Section: Discussionmentioning

confidence: 99%

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Rayleigh Scattering Density Measurements, Cluster Theory, and Nucleation Calculations at Mach 10

Balla

Everhart

2012

AIAA Journal

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In an exploratory investigation, quantitative unclustered laser Rayleigh scattering measurements of density were performed in the air in the NASA Langley Research Center's 31 in. Mach 10 wind tunnel. A review of 20 previous years of data in supersonic and Mach 6 hypersonic flows is presented where clustered signals typically overwhelmed molecular signals. A review of nucleation theory and accompanying nucleation calculations are also provided to interpret the current observed lack of clustering. Data were acquired at a fixed stagnation temperature near 990 K at five stagnation pressures spanning 2.41 to 10.0 MPa (350 to 1454 psi) using a pulsed argon fluoride excimer laser and double-intensified charge-coupled device camera. Data averaged over 371 images and 210 pixels along a 36.7 mm line measured freestream densities that agree with computed isentropic-expansion densities to less than 2% and less than 6% at the highest and lowest densities, respectively. Cluster-free Mach 10 results are compared with previous clustered Mach 6 and condensation-free Mach 14 results. Evidence is presented indicating vibrationally excited oxygen and nitrogen molecules are absorbed as the clusters form, release their excess energy, and inhibit or possibly reverse the clustering process. Implications for delaying clustering and condensation onset in hypersonic and hypervelocity facilities are discussed.

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Removal of 10-nm contaminant particles from Si wafers using argon bullet particles

et al. 2011

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Generation of nano-sized Ar–N2 compound particles by homogeneous nucleation and heterogeneous growth in a supersonic expansion

Cited by 15 publications

References 31 publications

Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles

Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particles

Rayleigh Scattering Density Measurements, Cluster Theory, and Nucleation Calculations at Mach 10

Removal of 10-nm contaminant particles from Si wafers using argon bullet particles

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