“…It has been widely used in many applications such as improving the printability or dyeability of polymeric materials [1,2], enhancing adhesion between fibers and matrices [3,4], and promoting biocompatibility of implanting parts [5]. Recently more attention has been paid to atmospheric plasma treatment due to advantages such as no need for a vacuum system, online process capabilities, high efficiency, and scalability to larger area [6][7][8].…”
“…It has been widely used in many applications such as improving the printability or dyeability of polymeric materials [1,2], enhancing adhesion between fibers and matrices [3,4], and promoting biocompatibility of implanting parts [5]. Recently more attention has been paid to atmospheric plasma treatment due to advantages such as no need for a vacuum system, online process capabilities, high efficiency, and scalability to larger area [6][7][8].…”
“…Possible reaction pathways for a CF 4 gas under RF-plasma glow discharge were reported by researchers [20][21][22][23]. The presence of an alternating RF-electromagnetic field across a plasma causes electron acceleration, which in turn leads to bond cleavage and ionization of CF 4 molecules.…”
“…[61] An interesting phenomenon has been found to occur with a MW system when various types of powders were placed in a quartz tube held orthogonal to the exit of an atmospheric pressure wave guide of a MW source (2.45 GHz) through which argon flowed. [62] Optical emissions were observed from a non-equilibrium, non-thermal plasma that was generated around the powder particles with the plasma expanding in the direction of the argon flow. It was found that this effect was specific to electrically conductive and heat-resistive materials such as perovskite-type oxides (e.g.…”
Section: Ap-pecvd Based On the Use Of Mw Dischargementioning
confidence: 99%
“…The plasma power was 30±120 W and the temperature of the walls of the quartz tube varied from 370 to 400 K with an argon gas flow of 120 ml min ±1 . The mechanism of the phenomenon is not clear, but it has been successfully used for surface modification of polymers, [62] surface treatment of steel, [63] and decomposition of inorganic gases. [64] The last of these applications suggests the technique could be useful for the activation of CVD processes, although it has not been tested for this purpose as yet.…”
Section: Ap-pecvd Based On the Use Of Mw Dischargementioning
This review gives an overview of the characteristics of various non-thermal, non-equilibrium plasmas and discusses applications of AP-PECVD with dielectric barrier discharges, corona discharges, RF discharges, and microwave discharges.
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