“…7 Although there is no systematic study of propagation loss in germanosilicate planar waveguides, the reported values range between 3.5 and 10 dB/cm 1,2 at ϭ632.8 nm and are larger than 2 dB/cm at ϭ1.55 m. 8 To reduce the loss, it is common practice to anneal the as-grown layers at temperatures as high as 1100°C for prolonged times. 1,9 Recently, Zhang et al 9 reported CVD-grown germanosilicate planar waveguides with propagation losses of about 2 and 1 dB/cm at wavelengths of 632.8 and 1550 nm, respectively. However, due to low index contrast, almost half of the mode power in those waveguides propagate in the cladding material, the effect of which is not taken into account in the reported loss values.…”