1998
DOI: 10.2172/1771
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Geometrical Aspects of a Hollow-cathode Magnetron (HCM)

Samuel A. Cohen1,
‪Zhehui Wang2

Abstract: A hollow-cathode magnetron (HCM), built by surrounding a planar sputteringmagnetron cathode with a hollow-cathode structure (HCS), 1 is operable at substantially lower pressures than its planar-magnetron counterpart. We have studied the dependence of

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