2006
DOI: 10.1016/j.conengprac.2005.01.003
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Geometrical error compensation and control of an XY table using neural networks

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Cited by 7 publications
(3 citation statements)
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“…Some papers have been focused only on the compensation problem. Tan et al [12,13] have developed an algorithm for the automatic generation of dynamic S-function blocks which can be used for geometrical error compensation of precision machines. The function block is composed of neural network approximations of the geometrical errors of the machines which can be served as the basis for error compensation.…”
Section: Geometrical Errors Compensationmentioning
confidence: 99%
“…Some papers have been focused only on the compensation problem. Tan et al [12,13] have developed an algorithm for the automatic generation of dynamic S-function blocks which can be used for geometrical error compensation of precision machines. The function block is composed of neural network approximations of the geometrical errors of the machines which can be served as the basis for error compensation.…”
Section: Geometrical Errors Compensationmentioning
confidence: 99%
“…Motion control is an important element in a wide range of industrial applications such as manufacturing machines and semiconductor manufacturing equipment [1,2,3]. Generally, each motion control system can be further divided into the mechanical subsystem and the control subsystem [4].…”
Section: Introductionmentioning
confidence: 99%
“…Imperfections in the mechanical subsystem are by far the main obstacle that lies in the way of the development of high precision positioning systems. These imperfections include geometric errors, thermal expansion, backlash and friction [1,2]. Geometric errors are the result of imperfections in the geometry of the mechanical components.…”
Section: Introductionmentioning
confidence: 99%