Gettering of gas molecules in the frit sealed glass panel by thin film metal coatings

Abstract

The thin film of getter materials is deposited on 3.5 x 4.5 cm soda glass plate. The purpose of this study is to ascertain the feasibility of thin film getters for in situ pumping of impurity gases, known as H20, CO, and O2 etc., in the field emission display (FED) panel. Zr and Ti based metal alloys are prepared by simple magnetron sputtering method. Many elements and their alloys have been tested under tight restrictions of cathode and hermetic sealing processes, i.e. acceptable activation temperature lower than 350 O C to protect from cathode damage and minimizing getter degradation during sealing process. The Ti/Zr thin film getter is activated at relatively low temperature (300 "C) and is shown to act as a possible in situ pump for FED.

Getter free vacuum packaging for MEMS

“…Much research was devoted to this field [8,16,18,19,[20][21][22][23][24][25][26][27][28] by using getter technology, and the appropriate getters applicable for MEMS devices need high temperature activation. This paper proposed a novel package design with a vacuum buffer cavity as shown in Fig.…”

“…Much research has been devoted to this field, trying to find solutions to increasing the vacuum level and enhancing the vacuum maintaining time, with most of them focusing their research on vacuum sealing processes and how to incorporate the getters into the small volume vacuum cavity of MEMS devices [13][14][15][16]. A few research groups use the patented getters to realize vacuum packaging and achieve more than 2-year vacuum maintaining lifetime [17][18][19]. However, the traditional getters are difficult to be incorporated into the packages because of their big volume, and their potential powder contamination on sensor chips.…”

“…In addition, these new getters are not available in China for Chinese researchers in MEMS vacuum packaging, further evaluation experiments cannot be conducted in our lab. It is to our best knowledge that only limited long time durability testing data for the device level MEMS vacuum packages has been reported in the public literature [17][18][19]. In addition, MEMS vacuum packaging has been highly proprietary and has been a barrier for the commercialization of a few high performance MEMS devices and systems.…”

Oblique angle deposition of Au/Ti porous getter films

“…To maintain a low internal pressure during the entire lifetime of the device, integration of a non-evaporable getter (NEG) in the cavity is then required. 3,4 The conventional bulk or sheet getters cannot be used for these small size packages. 5 Consequently, integrating getter films into the MEMS cavities to obtain and maintain the vacuum has been increasingly studied in the recent years.…”