Oblique angle deposition of Au/Ti porous getter films

Abstract

Interdiffusion in gold/titanium films with titanium evaporated on silicon at different oblique angles (0 , 30 , 50 , and 70) and gold evaporated under normal incidence is investigated using a scanning electron microscope and in-situ sheet resistance measurements for the optimization of the films' effective gettering ability during and after a low-temperature thermal activation. Films have a tilted columnar structure and a porosity increasing with the deposition angle in agreement with calculated values. The oxygen effective gettering ability, characterized by energy-dispersive X-ray spectroscopy, increases with the deposition angle. It is shown that the gold/titanium film with titanium deposited with an oblique angle of 50 is an optimized condition to obtain the largest sorption capacity after 1 h thermal activation at temperatures lower or equal to 300 C. This film has a low initial residual stress that becomes highly tensile if thermal activation is performed above 300 C.

Influence of Barrier Layers on ZrCoCe Getter Film Performance

“…Therefore, it is necessary to find a new barrier material to improve the sorption performance of the ZrCoCe getter films. For instance, Ti getter films have been widely used because of their good sorption performance and low activation temperature [ 21 , 22 , 23 ]. The densification of the Ti film can reduce the diffusion channel of active gas within, making Ti film an effective barrier layer.…”