2010
DOI: 10.1016/j.jeurceramsoc.2010.02.024
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Giant piezoresistivity of polymer-derived ceramics at high temperatures

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Cited by 71 publications
(53 citation statements)
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“…As shown below, C / SiOC containing 13.5 vol% of dispersed carbon exhibits k values of ≈ 10 2 in the temperature range from 1000 to 1200 • C. The k factor decreases with increasing temperature, indicating a direct correlation with activated electronic transport. The Arrhenius plot provides an activation energy of ≥ 0.3 eV for k. A similar behavior has been observed for C / SiOCN nanocomposites containing 8.5 vol% segregated carbon (Terauds et al, 2010). However, the two composites differ with respect to the magnitude of k. Rather high k values (k ≈ 10 3 ) have been reported for C / SiOCN in the temperature range 700 < T < 1000 • C. We note that the C / SiOCN composite has a lower carbon content than our sample and, accordingly, a higher resistivity and a higher k. In the following we present Raman data of the carbon phase of C / SiOC and combine them with the piezoresistivity results to provide evidence that the piezoresistive effect is linked to the microstructure of the carbon phase, notably its disordered non-crystalline part.…”
Section: Resultssupporting
confidence: 76%
See 1 more Smart Citation
“…As shown below, C / SiOC containing 13.5 vol% of dispersed carbon exhibits k values of ≈ 10 2 in the temperature range from 1000 to 1200 • C. The k factor decreases with increasing temperature, indicating a direct correlation with activated electronic transport. The Arrhenius plot provides an activation energy of ≥ 0.3 eV for k. A similar behavior has been observed for C / SiOCN nanocomposites containing 8.5 vol% segregated carbon (Terauds et al, 2010). However, the two composites differ with respect to the magnitude of k. Rather high k values (k ≈ 10 3 ) have been reported for C / SiOCN in the temperature range 700 < T < 1000 • C. We note that the C / SiOCN composite has a lower carbon content than our sample and, accordingly, a higher resistivity and a higher k. In the following we present Raman data of the carbon phase of C / SiOC and combine them with the piezoresistivity results to provide evidence that the piezoresistive effect is linked to the microstructure of the carbon phase, notably its disordered non-crystalline part.…”
Section: Resultssupporting
confidence: 76%
“…However, commercially available piezoresistive sensors, which are usually based on semiconductors or polymer composites, are limited by their low thermal stability in air (Kanda and Suzuki, 1991). Recently, polymer-derived ceramics (PDCs) such as silicon oxycarbides (C / SiOC) or silicon carbo(oxy)nitrides (C / SiCN, C / SiOCN) have been shown to combine piezoresistivity (Riedel et al, 2010;Zhang et al, 2008, Terauds et al, 2010 with outstanding temperature and oxidation stability (Riedel et al, 1995(Riedel et al, , 1996. Hence, they are promising candidates for future high-temperature pressure sensors.…”
Section: Introductionmentioning
confidence: 99%
“…The sensitivity of a piezoresistive sensor is determined by the strain gauge factor, given by G = 1 R dR d , where R is the resistance and the strain. The largest ambient temperature G found for single crystalline bulk silicon is G = 170, 3,5 and for germanium G = 100. 6 The state of the art material in the industry is poly-silicon, with G < 10, which can be improved to G 20 by using p-type poly-SiGe.…”
Section: Introductionmentioning
confidence: 97%
“…6 The state of the art material in the industry is poly-silicon, with G < 10, which can be improved to G 20 by using p-type poly-SiGe. 7 Recently, gauge factors of G 1000 were reported for silicon oxycarbonitride polymer-derived ceramic 5 and a G = 843 for a silicon-metal hybrid. 8 A lot of excitement was produced by the report of giant piezoresistivity in silicon nanowires, 9,10 with the latest room temperature value reported being G = 280.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, considerable amount of effort was invested by many groups to increase by nanostructuration the strain gauge factor (G ¼ ð1=RÞðdR=deÞ, where R is the resistance and e is the strain) of Si an Ge beyond their bulk values of around 170 [3,4] and 100 [5], respectively. In particular, giant piezoresistivity was recently reported in Si nanowires [6,7], demonstrating the great potential of low dimensional Sibased systems as promising candidates for next generation of piezoresistive nanosensors.…”
Section: Introductionmentioning
confidence: 99%