Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications

Milanović, V.; Matus, G.A.; McCormick, Daniel T.

doi:10.1109/jstqe.2004.829205

Cited by 183 publications

(106 citation statements)

References 14 publications

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“…In adaptive optics, tip-tilt-piston micromirror ( Figure. 1 (C)) arrays are used to compensate wavefront distortions generated by the medium [5]. The name "tip-tilt-piston" indicates that every single mirror has 3DOFs including the two rotational axes (tip/tilt) and a vertical linear motion (piston).…”

mentioning

confidence: 99%

A Tip-Tilt-Piston Micromirror With an Elastomeric Universal Joint Fabricated via Micromasonry

Yang

Jeong

Vakakis

et al. 2015

J. Microelectromech. Syst.

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This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated.iii

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confidence: 99%

A Tip-Tilt-Piston Micromirror With an Elastomeric Universal Joint Fabricated via Micromasonry

Yang

Jeong

Vakakis

et al. 2015

J. Microelectromech. Syst.

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“…Several MEMS driving and sensing solutions are available for these purposes, including thermal drivers, 15 electromagnetic drivers, 16 parallel plate electrostatic drivers 17 and electrostatic comb drivers. [17][18][19][20][21] One option for position feedback is piezoresistive sensing, which is easy to implement but is susceptible to ambient temperature fluctuations. Capacitive sensing is also relatively easy to utilize when vendor-supplied sensing electronics are available, but measurement resolution can still suffer when stray wire capacitance is not properly optimized.…”

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confidence: 99%

“…The fabrication of MEMS devices utilizing comb drivers is complicated and can involve technologies developed for the fabrication of internal sensors, pressure sensors, microphones, and MEMS scanners. [18][19][20][21] The MEMS mirror device studied in this work is shown in Figure 1, with a graphical representation of a comb drive in Fig. 1(c) and an SEM image of a drive part inset.…”

mentioning

confidence: 99%

“…The comb fingers are prepared by aligned etching (DRIE) of features in a device layer of single crystal silicon, both from the top of the layer and from beneath. 18 The device layer is bonded onto a supporting handle silicon layer, therefore forming an SOI (Silicon on Insulator) structure. As seen in Fig.…”

mentioning

confidence: 99%

“…More information and details regarding comb driven devices can be found in Ref. 18. The MEMS device used in our studies provides ±6 • tilting angle for a 1.7 mm diameter sample with up to a 0.4 mg load.…”

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confidence: 99%

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Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

Lauer

Yan

et al. 2015

AIP Advances

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X-ray microscopy is a powerful, non-invasive tool used for nanometer-scale resolution imaging, and it is widely applied in various areas of science and technology. To push the spatial resolution of x-ray microscopy studies in the hard x-ray regime below 10 nm, Multilayer Laue Lenses (MLL) can be used as nanofocusing elements. To ensure distortion-free x-ray imaging, high-stability microscopy systems are required. MEMS-based manipulators are a promising route to achieve high stability when used for alignment and manipulation of nanofocusing optics. In this work, we present a tip-tilt MEMS-based device suitable for MLL alignment. We fully characterize the device and demonstrate better-than 10 millidegree angular positioning resolution when utilizing capacitive displacement sensors, and better-than 0.8 millidegree resolution when using laser interferometry.

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5-2: MEMS Mirror Based Dynamic Solid State Lighting Module

Kasturi¹,

Milanović²,

Yang³

2016

SID Symposium Digest of Technical Papers

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A novel dynamic solid state lighting (SSL) module is demonstrated, allowing users to program the direction, brightness, divergence and shape of a projected white light in a variety of lighting applications. The module is enabled by a fast beams‐teering MEMS mirror with high optical power handling. In order to produce and project bright white light, the module illuminates a phosphor target with a high power laser of several Watts. A projection lens projects the phosphor target into a cone of light of up to 60°. This light projection is arbitrarily shaped and dynamically programmable by controlling a MEMS mirror scan head to address specific portions of the proper target. An adjustable focus lens in the scan head further allows control of projected beam divergence. Successful prototypes were demonstrated with both a single 445nm laser diode source (2.5W laser power). While the prototypes have to date been limited by available power of the laser sources, it is estimated that the novel MEMS mirror scan head design allows >10W (CW) operation on a 2mm without multilayer dielectric coatings. The introduction of dynamic laser beam steering is a paradigm shift toward a new generation of solid state lighting (SSL) with real‐time control of ”lighting content”.

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Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications

Cited by 183 publications

References 14 publications

A Tip-Tilt-Piston Micromirror With an Elastomeric Universal Joint Fabricated via Micromasonry

A Tip-Tilt-Piston Micromirror With an Elastomeric Universal Joint Fabricated via Micromasonry

Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

5-2: MEMS Mirror Based Dynamic Solid State Lighting Module

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