2012
DOI: 10.1016/j.phpro.2012.03.651
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Graphene Grown on Sapphire Surface by Using SiC Buffer Layer with SSMBE

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Cited by 3 publications
(4 citation statements)
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“…As a result of its remarkable properties, the graphene has been widely studied in last years. Several techniques have been used to synthesize the graphene, such as mechanical exfoliation 1,7 , chemical exfoliation 8,9 , chemical vapor deposition (CVD) 10,11 , chemical reduction of graphite oxide 12 , growth on transition metals 13,14 , and thermal decomposition of SiC, that allows to synthesize an epitaxial graphene [15][16][17][18][19][20][21][22] . Several papers report the growth of epitaxial graphene on SiC by thermal decomposition in induction furnaces operating at vacuum or at atmospheric pressure with an inert gas flow.…”
Section: Introductionmentioning
confidence: 99%
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“…As a result of its remarkable properties, the graphene has been widely studied in last years. Several techniques have been used to synthesize the graphene, such as mechanical exfoliation 1,7 , chemical exfoliation 8,9 , chemical vapor deposition (CVD) 10,11 , chemical reduction of graphite oxide 12 , growth on transition metals 13,14 , and thermal decomposition of SiC, that allows to synthesize an epitaxial graphene [15][16][17][18][19][20][21][22] . Several papers report the growth of epitaxial graphene on SiC by thermal decomposition in induction furnaces operating at vacuum or at atmospheric pressure with an inert gas flow.…”
Section: Introductionmentioning
confidence: 99%
“…In such methods, the sample should achieve temperatures sufficiently high to break the Si-C bands at the upper crystalline layers of SiC. Therefore, Si atoms will be sublimated and the graphitization will be able to occur, where the C atoms on the top of surface are rearranged to synthesize the epitaxial graphene 4,[16][17][18][19] . In order to create alternative processes, some studies have shown that the addition of a layer of "catalyst material" (such as Ni or Co) promotes the reduction of the temperature required for SiC decomposition [23][24][25][26] .…”
Section: Introductionmentioning
confidence: 99%
“…Among the graphene synthesis methods, the thermal decomposition processes have been successfully used to grow graphene layers on silicon carbide (SiC) [ 2 , 3 , 4 , 5 ]. In general, these studies show the use of SiC wafers as substrates to be decomposed by heating, using an induction furnace at vacuum or at atmospheric pressure with an inert gas flow [ 6 , 7 , 8 , 9 , 10 ]. The kinetics of graphene formation and properties, such as structure and morphology, have been shown to be dependent on the reactor pressure, type of gas atmosphere, orientation, and face termination of the SiC wafer [ 10 , 11 , 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…Among the graphene synthesis methods, the thermal decomposition processes have been successful used to grow graphene layers on silicon carbide (SiC) [2][3][4][5]. In general, these studies show the use of SiC wafers as substrates to be decomposed by heating using an induction furnace at vacuum or at atmospheric pressure with an inert gas flow [6][7][8][9][10]. The kinetics of graphene formation and properties, such as structure and morphology, show to be dependent on the reactor pressure, type of gas atmosphere, orientation and face termination of the SiC wafer [10][11][12].…”
Section: Introductionmentioning
confidence: 99%