Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback

Dawson, Jeremy; Wang, L.; Famouri, Parviz; Hornak, L.A.

doi:10.1364/ol.28.001263

Cited by 6 publications

(4 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The instantaneous displacement x͑t͒ of the resonant cantilever beam can be measured by devices such as position-sensing circuit or optical microprobe. 17 The displacement is then fed into a properly designed circuit that provides a voltage signal proportional to the feedback control signal k e x͑t͒, which then determines the desirable electrostatic force.…”

Section: Discussionmentioning

confidence: 99%

Controlling bistability in microelectromechanical resonators

Chen

Huang

Lai

2008

Chaos: An Interdisciplinary Journal of Nonlinear Science

View full text Add to dashboard Cite

For a microelectromechanical (MEM) resonator, the combination of mechanical nonlinearity and electrical driving force can lead to bistability. In such a case, the system exhibits two coexisting stable oscillatory states (attractors): one with low and another with high energy. Under the influence of noise, with high probability the system can be perturbed into the low-energy state. We propose a robust control scheme to place the system in the high-energy state. Our idea is not to pull the system out of the bistable regime but instead to take advantage of the nonlinear dynamics to achieve high-energy output. In particular, our control scheme consists of two steps: bifurcation control that temporarily drives the system to a regime with only one attractor, one that is the continuation of the high-energy attractor in the bistable regime; and ramping parameter control that restores the bistability while maintaining the system in the high-energy attractor. We derive an analytic theory to guide the control, provide numerical examples, and suggest a practical method to realize the control experimentally. Our result may find potential usage in devices based on MEM resonators where high output energy is desired.

show abstract

Section: Discussionmentioning

confidence: 99%

Controlling bistability in microelectromechanical resonators

Chen

Huang

Lai

2008

Chaos: An Interdisciplinary Journal of Nonlinear Science

View full text Add to dashboard Cite

show abstract

“…Current research being performed at West Virginia University (WVU) is focusing on closed loop feedback control and fault detection of lateral comb resonators (LCR) using a through-wafer optical probe for characterization of device parameters and continuous monitoring of device motion [12,13,14,15]. LCRs were designed with a 2 µm pitch grating structure built into the shuttle that would interact with the through-wafer probe giving a positional resolution of 2 µm of motion.…”

Section: Quality Assurance/fault Detectionmentioning

confidence: 99%

Diffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonators

McCormick¹

View full text Add to dashboard Cite

Analysis of fault characteristics and control of microelectromechanical systems (MEMS) is becoming increasingly important as these devices are incorporated into safety critical systems. Mechanically decoupled monitoring techniques are needed to ensure that accurate, low-noise positional information is gathered from these devices during operation. Optical monitoring has been shown by various groups to be capable of achieving this goal. However, Integrated Optical Monitoring (IOM) must be achieved in order to enable incorporation with the MEMS die in a single package for effective lifetime system monitoring. This research addresses the design, fabrication and testing of diffractive optical elements (DOEs) for achieving IOM.. DOEs for on and off-axis single and multiple beam generation are modeled based on a linear optical system model paraxial gaussian beam theory. The DOEs are generated using a MATLAB tool that was completed as part of this work to calculate the desired input wave, output wave, and transfer function. This data is then used to generate a phase lens profile with an etch depth that is dependent on the material that will be used for lens fabrication. DOEs are fabricated on a borosilicate substrate and testing of the lenses is performed using a beam profiler to determine the number, shape and power of the probe beams for comparison with the results from the simulated lenses. Experimental DOE test results compare well with those obtained from the modeling tool validating the use of the DOE design tool and the fabrication process for subsequent research implementing IOM architectures.

show abstract

“…The through-wafer optical monitoring system is a setup that was developed at West Virginia University to measure the motion of the MEMS lateral comb resonator device [64,70,71,72,73]. A schematic of this test setup is presented in Figure 3.3.…”

Section: Through-wafer Optical Monitoring Systemmentioning

confidence: 99%

“…Schematic of the Through-Wafer Optical MonitoringSystem utilized at West Virginia University[64,71,72,73] The monitoring setup consists of an inferred (IR) source (1310nm wavelength), a set of bulk optics, a single mode optical fiber, and a low-noise IR detector. The MEMS die is positioned between the bulk lens and the optical fiber.…”

mentioning

confidence: 99%

Diagnosis of operational changes in microelectromechanical systems via fault detection

Rittenhouse¹

View full text Add to dashboard Cite

As microelectromechanical systems (MEMS) devices migrate into progressively more critical systems, the reliability these devices have to demonstrate must increasingly improve. Current research in the reliability of MEMS has succeeded in increasing the reliability of commercialized MEMS before they are integrated into an application by focusing on fabrication processes, device materials, and packaging. In this study, the focus is on assessing the reliability of MEMS during device operation. A fault detection approach was taken to diagnose incipient changes in the operation of MEMS devices. Model-based fault detection schemes utilizing the Kalman filter and H ∞ filter as residual generators were investigated. Analysis of the residual was conducted using a discrete Fourier transform (DFT). Two common MEMS research devices, the lateral comb resonator and parallel plate actuator, are used to demonstrate theoretically and experimentally the ability of the fault detectors to identify induced faults in linear and nonlinear domains of system operation. v 3.3.1 Extended Kalman Filter Results .

show abstract

Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback

Cited by 6 publications

References 6 publications

Controlling bistability in microelectromechanical resonators

Controlling bistability in microelectromechanical resonators

Diffractive optical lens design and fabrication for integrated monitoring of microelectromechanical lateral comb resonators

Diagnosis of operational changes in microelectromechanical systems via fault detection

Contact Info

Product

Resources

About