2000
DOI: 10.1017/s088571560001109x
|View full text |Cite
|
Sign up to set email alerts
|

Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

Abstract: The reflection shift δ2Θ caused by a radial shift δr of the sample away from its tangential position at the focusing circle is examined for grazing incidence diffraction and grazing excidence diffraction. Experimental results for residual strain/stress evaluation on thin films using a Bragg–Brentano diffractometer with a grazing incidence equipment are presented. Grazing excidence diffraction is less sensitive to δr than grazing incidence diffraction.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2002
2002
2018
2018

Publication Types

Select...
6

Relationship

1
5

Authors

Journals

citations
Cited by 9 publications
(1 citation statement)
references
References 19 publications
0
1
0
Order By: Relevance
“…The structure is assumed to be a distorted form of hexagonal structure observed in fibers 14 rather than a purely new architecture. Finally, note that the strain is observable, even lacking a more strict analysis of peak shifting due to geometry 1 Main GIXD Reflections in Figure : Positions, Corresponding Bragg Distances, d , Correlation Lengths, L , and the Indexation for the Orientation Types I and II q x (Å -1 ) q y (Å -1 ) q (Å -1 ) d (Å) L (Å) hkl type I hkl type II 0.012 −0.865 0.865 7.26 0 −2 0 0.013 −0.752 0.752 8.35 −2 1 0 0.013 −0.436 0.436 14.40 0 −1 0 0.013 0.436 0.436 14.40 230 0 1 0 0.012 0.749 0.749 8.39 270 2 −1 0 0.013 0.860 0.860 7.31 190 0 2 0 0.219 −0.375 0.434 14.46 −1 1 0 0.218 0.378 0.436 14.41 1 0 0 0.456 −1.479 1.547 4.06 −4 3 0 0.381 −1.073 1.139 5.52 1 −3 0 0.383 −0.645 0.750 8.38 1 −2 0 0.381 −0.217 0.438 14.33 1 −1 0 0.381 0.217 0.438 14.34 270 1 0 0 0.381 0.645 0.749 8.39 1 1 0 0.387 1.079 1.146 5.48 1 2 0 0.437 0.001 0.437 14.37 0 1 0 0.661 −0.369 0.757 8.30 −1 2 0 0.663 0.368 0.758 8.28 …”
Section: Resultsmentioning
confidence: 99%
“…The structure is assumed to be a distorted form of hexagonal structure observed in fibers 14 rather than a purely new architecture. Finally, note that the strain is observable, even lacking a more strict analysis of peak shifting due to geometry 1 Main GIXD Reflections in Figure : Positions, Corresponding Bragg Distances, d , Correlation Lengths, L , and the Indexation for the Orientation Types I and II q x (Å -1 ) q y (Å -1 ) q (Å -1 ) d (Å) L (Å) hkl type I hkl type II 0.012 −0.865 0.865 7.26 0 −2 0 0.013 −0.752 0.752 8.35 −2 1 0 0.013 −0.436 0.436 14.40 0 −1 0 0.013 0.436 0.436 14.40 230 0 1 0 0.012 0.749 0.749 8.39 270 2 −1 0 0.013 0.860 0.860 7.31 190 0 2 0 0.219 −0.375 0.434 14.46 −1 1 0 0.218 0.378 0.436 14.41 1 0 0 0.456 −1.479 1.547 4.06 −4 3 0 0.381 −1.073 1.139 5.52 1 −3 0 0.383 −0.645 0.750 8.38 1 −2 0 0.381 −0.217 0.438 14.33 1 −1 0 0.381 0.217 0.438 14.34 270 1 0 0 0.381 0.645 0.749 8.39 1 1 0 0.387 1.079 1.146 5.48 1 2 0 0.437 0.001 0.437 14.37 0 1 0 0.661 −0.369 0.757 8.30 −1 2 0 0.663 0.368 0.758 8.28 …”
Section: Resultsmentioning
confidence: 99%