Grazing incidence impact of ions on an adatom-covered surface: Molecular-dynamics study of sputtering, surface-damage formation and ion-induced adatom mobility

Rosandi, Yudi; Urbassek, Herbert M.

doi:10.1016/j.susc.2005.12.063

Cited by 9 publications

(9 citation statements)

References 16 publications

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“…In other words, for small adatom coverages, H ( 1, the sputter yield is around Y ¼ 16:5H. These findings are in agreement with previous simulations of sputtering of a Pt surface, which is randomly covered with adatoms [9]. 3.…”

Section: Discussionsupporting

confidence: 92%

“…In Fig. 5 we compare this result with published data on the sputtering yield of a surface, which is randomly covered with adatoms [9]. This is possible by extrapolating our present result using Eq.…”

Section: Fate Of Targetsupporting

confidence: 59%

“…Finally, at low temperatures, surfaces may be atomically rough. In a simple model, assuming the atomic roughness to be provided by a random distribution of adatoms, atomic roughness was shown to dramatically increase sputter and damage yields for grazing incidence angles [9]. However, in that investigation, the detailed mechanism, by which this enhancement is produced, could not be resolved.…”

Section: Introductionmentioning

confidence: 89%

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Influence of a single adatom on sputtering at grazing incidence – A molecular-dynamics case study of 5keV Ar impact on Pt (111)

Rosandi

Redinger²,

Michely³

et al. 2009

Surface Science

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a b s t r a c tGrazing incidence ion impact on a flat terrace lets the projectile reflect specularly off the surface, leading to little or no damage production or sputtering. The presence of isolated surface defects may change this behaviour drastically. We investigate this phenomenon for the specific case of 5 keV Ar ions impinging at 83°towards the surface normal onto the Pt (1 1 1) surface. Molecular-dynamics simulations allow to study the influence of isolated adatoms in detail. The scattering of the projectile from the adatom can redirect the projectile, or let the adatom recoil, such that either of them deposits considerable energy in the target surface, leading to abundant damage production and sputtering. Two distinct collision zones are identified: (i) When the projectile hits the surface in front of the adatom, it may collide with the adatom indirectly (after being specularly reflected off the surface); (ii) alternatively, it may hit the adatom directly. We quantify our results by measuring the zone of influence (ffi 13 Å 2 ) around the adatom, into which the projectile must hit in order to collide with the adatom, and by the sputter cross section of roughly 110 Å 2 . The data compare well with previous simulation results of sputtering from an atomically rough surface.

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Section: Discussionsupporting

confidence: 92%

Section: Fate Of Targetsupporting

confidence: 59%

Section: Introductionmentioning

confidence: 89%

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Influence of a single adatom on sputtering at grazing incidence – A molecular-dynamics case study of 5keV Ar impact on Pt (111)

Rosandi

Redinger²,

Michely³

et al. 2009

Surface Science

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“…However, due to thermal vibrations, adatom-vacancy pairs may be produced. The liberated adatoms-also occasionally adsorbed molecules from the background gas-may cause a few sputtering events to occur, 25 resulting in an excess of surface vacancies. After a considerable induction time, these mobile surface vacancies may be sufficient in number to aggregate to form small vacancy clusters.…”

Section: Amentioning

confidence: 99%

Step-edge sputtering through grazing incidence ions investigated by scanning tunneling microscopy and molecular dynamics simulations

et al. 2008

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Scanning tunneling microscopy is used to quantify step-edge sputtering of Pt͑111͒ at 550 K by grazing incidence ion bombardment with 5 keV Ar + ions. For bombardment conditions causing negligible erosion on terraces, damage features associated with step bombardment allow us to visualize step retraction and thus to quantify the step-edge sputtering yield. An alternative method for step-edge yield determination, which is applicable under more general conditions, is the analysis of the concentration of ascending steps together with the removed amount as a function of ion fluence. Interestingly, the azimuthal direction of the impinging ions with respect to the surface significantly changes the sputtering yield at step edges. This change is attributed to the orientation dependence of subsurface channeling. Atomistic insight into step-edge sputtering and its azimuthal dependence is given by molecular dynamics simulations of ion impacts at 0 and 550 K. The simulations also demonstrate a strong dependence of the step-edge sputtering yield on temperature.

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“…If the ion scatters at a surface defect -such as an adsorbate or an adatom, or as in the present work, a surface step -a substantial amount of the ion energy may be transferred to the surface, inducing defect formation and sputtering. This mechanism has been investigated recently both by molecular-dynamics simulation and by experimental measurements based on scanning tunneling microscopy [1][2][3][4][5][6][7]. The phenomenon is of immediate interest to the field of the nanopatterning of thin films [8,9] with applications, e.g.…”

Section: Introductionmentioning

confidence: 99%

Competition of terrace and step-edge sputtering under oblique-incidence ion impact on a stepped Pt(111) surface

Rosandi

Redinger

Michely

et al. 2009

Nuclear Instruments and Methods in Physics Research Section B:

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a b s t r a c tUsing molecular-dynamics simulation, we study the sputtering of a Pt(1 1 1) surface under oblique and glancing incidence 5 keV Ar ions. For incidence angles larger than a critical angle # c , the projectile is reflected off the surface and the sputter yield is zero. We discuss the azimuth dependence of the critical angle # c with the help of the surface corrugation felt by the impinging ion. If a step exists on the surface, sputtering occurs also for glancing incidence # > # c . We demonstrate that for realistic step densities, the total sputtering of a stepped surface may be sizable even at glancing incidence.

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Grazing incidence impact of ions on an adatom-covered surface: Molecular-dynamics study of sputtering, surface-damage formation and ion-induced adatom mobility

Cited by 9 publications

References 16 publications

Influence of a single adatom on sputtering at grazing incidence – A molecular-dynamics case study of 5keV Ar impact on Pt (111)

Influence of a single adatom on sputtering at grazing incidence – A molecular-dynamics case study of 5keV Ar impact on Pt (111)

Step-edge sputtering through grazing incidence ions investigated by scanning tunneling microscopy and molecular dynamics simulations

Competition of terrace and step-edge sputtering under oblique-incidence ion impact on a stepped Pt(111) surface

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