Eu-doped BaTiO 3 thin films with a pseudo-cubic perovskite structure were successfully fabricated on magnesia substrates at low temperature by using a high-concentration sol-gel process, in which the newly developed gel-aging process on substrate was employed. Film microstructure, crystallinity, sintering properties and photoluminescence (PL) were investigated. The xerogel thin films exhibited strong PL associated with Eu 3þ ions under ultraviolet excitation at room temperature; the PL was visible to naked eyes. The intensity maximum of PL was reached with doping concentration of about 8 mol%. Sintering above 600 8C caused reduction of europium, resulting in a rapid quenching of Eu 3þ emission and enhancement of Eu 2þ emission.