High quality ZnS thin films are important for light emitting diodes based on ZnS, which is a very efficient phosphor. To improve as grown, molecular beam epitaxial, ͑111͒-oriented cubic ZnS films, where defects were introduced due to the large mismatch between ZnS and a sapphire substrate (ϳ20%), the ZnS was recrystallized by annealing at temperatures in the 825-1000°C range, and sulfur pressures of 10 atm. The films have been structurally characterized by high-resolution x-ray diffraction, and electron diffraction by electron channeling patterns. Structural properties of the films annealed at temperatures above 900°have improved significantly. Tilting in the recrystallized films has been reduced more than tenfold, with the recrystallized grains being defect-free. Most films were recrystallized in the as-grown, cubic form, as shown by electron channeling patterns. The surfaces of the films have been inspected with scanning electron microscope, and on most samples they have been found to remain smooth, although on some of the films annealed at elevated temperatures we have observed hexagonal pits. The role of sulfur gas overpressure in the recrystallization has been discussed, and possible effects on film evaporation, grain boundary migration and compliancy of sapphire substrate have been analyzed. © 1998 American Institute of Physics. ͓S0003-6951͑98͒03022-8͔Zinc sulfide, with its wide band gap (ϳ3.8 eV) and excellent luminescence, which can be obtained in almost the whole visible range with suitable dopants, is a very attractive material for light emitting diodes ͑LEDs͒, 1,2 lasers, 3 and flatpanel electroluminescent ͑EL͒ displays. 4,5 We have recently proposed 6 and demonstrated 7 an n-ZnS:͑Ag,Al͒/ p-GaN:Mg heterostructure blue light emitting LED. The fabrication of this device requires growth of ZnS on a heavily mismatched GaN substrate. The initial phases of growth in the heavily mismatched interface geometry are the most critical, and it is not expected that the ZnS epilayer would grow coherently for more than 1 monolayer. 7 In fact, the large mismatchrelated energy will be relaxed in the form of tilting and threedimensional relaxation. 7,8 This would certainly damage the overall crystalline quality of the ZnS layer, which is known to be critical to the performance of the II-VI-based optical devices. 9 In this study, we report on the solid phase recrystallization ͑SPR͒ of undoped, 0.3-0.5 m thick, molecular beam epitaxy ͑MBE͒ grown, ͑111͒-oriented, cubic ZnS films on sapphire ͑ϳ20% mismatch͒. Details about the growth system and procedures can be found in Ref. 7. Thermal annealing at large sulfur overpressure consistently improved the structural properties of the films, thereby compensating the effects of strong mismatch. Some of the previous efforts on recrystallization of thin films are described in Ref. 10. Presently, recrystallization is an important industrial process, and plays a vital role in the manufacture of steel and aluminum, 11 and HgCdTe. 12 Solid phase recrystallization of bulk ZnSe, CdTe and C...