13th International Conference on Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. 2004
DOI: 10.1109/sim.2005.1511405
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Growth and characterization of nano diamond powder fabricated by microwave plasma torch

Abstract: A novel designed microwave plasma torch equipment has been setup for synthesizing the nano diamond powder (NDP). In this equipment microwave plasma can be maintained at rather high pressure with high flow rate of gas. The synthesis process has been performed using mixed gas of CH 4 and Ar or N 2 varied with gas flow rate and pressure. The size of synthesized NDP could be controlled from 20 to 50 nm and even bigger to micrometer. The structure and compositions of NDP have been analyzed by High Resolution Transm… Show more

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