2004
DOI: 10.1016/j.jcrysgro.2004.03.013
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Growth and electrical properties of compositionally graded Pb(ZrxTi1−x)O3 thin films on PbZrO3 buffered Pt/Ti/SiO2/Si substrates

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Cited by 11 publications
(3 citation statements)
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“…Which is higher than that of PZT (52/48) films (F D =7.0×10 -6 Pa -0.5 at 1 kHz) [24], and PZT(30/70) films (F D =0.81×10 -6 Pa -0.5 at 1 kHz) [25]; slightly lower than that of sol-gel derived PZT(15/85) films (F D =13 ~ 15×10 -6 Pa -0.5 ) [26]; and lower than that of epitaxial grown PZT(45/55) (F D =20×10 -6 Pa -0.5 ) and PZT(90/10) (F D =17×10 -6 Pa -0.5 ) films [27]. From the results, the dielectric, ferroelectric and pyroelectric properties of the (001)-oriented PSZT film are better than that of the graded PZT film [28].…”
mentioning
confidence: 83%
“…Which is higher than that of PZT (52/48) films (F D =7.0×10 -6 Pa -0.5 at 1 kHz) [24], and PZT(30/70) films (F D =0.81×10 -6 Pa -0.5 at 1 kHz) [25]; slightly lower than that of sol-gel derived PZT(15/85) films (F D =13 ~ 15×10 -6 Pa -0.5 ) [26]; and lower than that of epitaxial grown PZT(45/55) (F D =20×10 -6 Pa -0.5 ) and PZT(90/10) (F D =17×10 -6 Pa -0.5 ) films [27]. From the results, the dielectric, ferroelectric and pyroelectric properties of the (001)-oriented PSZT film are better than that of the graded PZT film [28].…”
mentioning
confidence: 83%
“…In recent years, the energy manufacturers have been seeking diverse types of the FGMs, in order to improve the performance and efficiency of some of their devices. The FGMs have been strongly used in the energy field [214][215][216][217] including piezoelectric FGMs for the ultrasonic transducers, actuators, damping materials, energy absorption, energy harvesting, thermoelectric converter for energy conversion, solar panels, solar cells, fuel cells, turbine blade coatings and the graded electrode for the production of solid oxide fuels cells [71,213,[218][219][220][221][222][223][224][225][226][227][228][229][230][231][232][233][234][235][236]. Cano et al [218] have studied the growth of hybrid III-V/SiGe solar cells on Si substrates through reverse graded buffers.…”
Section: Energymentioning
confidence: 99%
“…The well-crystallized perovskite phase and the crystallographic orientation have been pointed out to play an important role in determining the performance of the PZT films (Tang et al, 2004;Hu et al, 2004;Wang et al, 2002;Gong et al, 2004a), both of which are closely related to the deposition process and post-annealing condition. Indeed, the functional properties of PZT films show great correlation with the specific microstructure with preferred orientation, i.e., texture.…”
Section: Introductionmentioning
confidence: 99%